{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,2]],"date-time":"2025-11-02T15:43:06Z","timestamp":1762098186328,"version":"build-2065373602"},"reference-count":15,"publisher":"IEEE","license":[{"start":{"date-parts":[[2023,10,1]],"date-time":"2023-10-01T00:00:00Z","timestamp":1696118400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,10,1]],"date-time":"2023-10-01T00:00:00Z","timestamp":1696118400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2023,10,1]]},"DOI":"10.1109\/iros55552.2023.10342526","type":"proceedings-article","created":{"date-parts":[[2023,12,13]],"date-time":"2023-12-13T19:17:55Z","timestamp":1702495075000},"page":"8304-8309","source":"Crossref","is-referenced-by-count":3,"title":["Motion Orchestration in Dual-Stage Wafer Scanners"],"prefix":"10.1109","author":[{"given":"Yazan M.","family":"Al-Rawashdeh","sequence":"first","affiliation":[{"name":"Memorial University,Department of Mechanical and Mechatronics Engineering,St. John's,Newfoundland,Canada,A1B3X5"}]},{"given":"Marcel","family":"Heertjes","sequence":"additional","affiliation":[{"name":"ASML"}]},{"given":"Mohammad","family":"Al Janaideh","sequence":"additional","affiliation":[{"name":"School of Engineering, University of Guelph,Guelph,ON,Canada,N1G 2W1"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/mcs.2011.941882"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2015.2418311"},{"volume-title":"Estimation and control of large-scale systems with an application to adaptive optics for EUV lithography","year":"2014","author":"Haber","key":"ref3"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechmachtheory.2021.104638"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/IROS51168.2021.9636016"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2022.3196318"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/CCTA48906.2021.9659262"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1098\/rsta.2011.0054"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2018.2882341"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1007\/s11044-013-9344-0"},{"volume-title":"The Design of High Performance Mechatronics-: High-Tech Functionality by Multidisci-plinary System Integration","year":"2020","author":"Schmidt","key":"ref11"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.automatica.2015.06.025"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1016\/j.conengprac.2004.02.010"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.23919\/ACC45564.2020.9147464"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/j.conengprac.2008.08.004"}],"event":{"name":"2023 IEEE\/RSJ International Conference on Intelligent Robots and Systems (IROS)","start":{"date-parts":[[2023,10,1]]},"location":"Detroit, MI, USA","end":{"date-parts":[[2023,10,5]]}},"container-title":["2023 IEEE\/RSJ International Conference on Intelligent Robots and Systems (IROS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/10341341\/10341342\/10342526.pdf?arnumber=10342526","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,1,24]],"date-time":"2024-01-24T04:46:11Z","timestamp":1706071571000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10342526\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,10,1]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/iros55552.2023.10342526","relation":{},"subject":[],"published":{"date-parts":[[2023,10,1]]}}}