{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T18:43:15Z","timestamp":1725475395091},"reference-count":9,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,4]]},"DOI":"10.1109\/irps.2015.7112700","type":"proceedings-article","created":{"date-parts":[[2015,6,3]],"date-time":"2015-06-03T15:32:57Z","timestamp":1433345577000},"page":"3A.4.1-3A.4.6","source":"Crossref","is-referenced-by-count":0,"title":["An investigation of capacitance aging model for extreme low-k and high-k dielectrics"],"prefix":"10.1109","author":[{"given":"M. N.","family":"Chang","sequence":"first","affiliation":[]},{"given":"Y.-H.","family":"Lee","sequence":"additional","affiliation":[]},{"given":"S. Y.","family":"Lee","sequence":"additional","affiliation":[]},{"given":"C. C.","family":"Chiu","sequence":"additional","affiliation":[]},{"given":"D.","family":"Maji","sequence":"additional","affiliation":[]},{"given":"K.","family":"Wu","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"doi-asserted-by":"publisher","key":"ref4","DOI":"10.1109\/TDMR.2007.907406"},{"doi-asserted-by":"publisher","key":"ref3","DOI":"10.1143\/JJAP.50.04DD02"},{"doi-asserted-by":"publisher","key":"ref6","DOI":"10.1109\/IRPS.2012.6241804"},{"doi-asserted-by":"publisher","key":"ref5","DOI":"10.1116\/1.1736645"},{"doi-asserted-by":"publisher","key":"ref8","DOI":"10.1063\/1.4788980"},{"doi-asserted-by":"publisher","key":"ref7","DOI":"10.1109\/IEDM.2010.5703480"},{"doi-asserted-by":"publisher","key":"ref2","DOI":"10.1109\/IRWS.2009.5383022"},{"key":"ref9","first-page":"bd","article-title":"Trap spectroscopy and Ta penetration induced charge trapping in porous SiOCH low-k dielectrics","author":"li","year":"0","journal-title":"Reliability Physics Symposium (IRPS) 2013 IEEE International"},{"doi-asserted-by":"publisher","key":"ref1","DOI":"10.1016\/S0026-2714(03)00177-X"}],"event":{"name":"2015 IEEE International Reliability Physics Symposium (IRPS)","start":{"date-parts":[[2015,4,19]]},"location":"Monterey, CA, USA","end":{"date-parts":[[2015,4,23]]}},"container-title":["2015 IEEE International Reliability Physics Symposium"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7106273\/7112653\/07112700.pdf?arnumber=7112700","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,24]],"date-time":"2017-03-24T15:23:25Z","timestamp":1490369005000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7112700\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,4]]},"references-count":9,"URL":"https:\/\/doi.org\/10.1109\/irps.2015.7112700","relation":{},"subject":[],"published":{"date-parts":[[2015,4]]}}}