{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,20]],"date-time":"2025-12-20T22:11:49Z","timestamp":1766268709076},"reference-count":23,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,3,1]],"date-time":"2021-03-01T00:00:00Z","timestamp":1614556800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,3,1]],"date-time":"2021-03-01T00:00:00Z","timestamp":1614556800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,3,1]],"date-time":"2021-03-01T00:00:00Z","timestamp":1614556800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,3]]},"DOI":"10.1109\/irps46558.2021.9405095","type":"proceedings-article","created":{"date-parts":[[2021,4,26]],"date-time":"2021-04-26T22:48:05Z","timestamp":1619477285000},"page":"1-5","source":"Crossref","is-referenced-by-count":1,"title":["A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies"],"prefix":"10.1109","author":[{"given":"A.","family":"Vais","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"B.","family":"Hsu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"O.","family":"Syshchyk","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"H.","family":"Yu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"A.","family":"Alian","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Y.","family":"Mols","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"K. V.","family":"Kodandarama","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"B.","family":"Kunert","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"N.","family":"Waldron","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"E.","family":"Simoen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"N.","family":"Collaert","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6641\/aad655"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM19573.2019.8993539"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/VLSIT.2018.8510619"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1007\/BF00900067"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1088\/0022-3727\/44\/30\/305303"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1063\/1.325265"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/j.solmat.2005.01.009"},{"journal-title":"Synopsys Inc","year":"2019","author":"sentaurus","key":"ref17"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1063\/1.3537915"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1063\/1.4755804"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.18.113"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1063\/1.1663719"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1063\/1.4966284"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1063\/1.4929371"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1117\/12.2511746"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1116\/1.4789427"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1063\/1.1754385"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/JEDS.2016.2571666"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.3390\/cryst9020087"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.6b02061"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1039\/C8TC00070K"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1021\/nn1033967"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1016\/j.sse.2016.07.002"}],"event":{"name":"2021 IEEE International Reliability Physics Symposium (IRPS)","start":{"date-parts":[[2021,3,21]]},"location":"Monterey, CA, USA","end":{"date-parts":[[2021,3,25]]}},"container-title":["2021 IEEE International Reliability Physics Symposium (IRPS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9405068\/9405088\/09405095.pdf?arnumber=9405095","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,7,9]],"date-time":"2022-07-09T02:20:32Z","timestamp":1657333232000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9405095\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,3]]},"references-count":23,"URL":"https:\/\/doi.org\/10.1109\/irps46558.2021.9405095","relation":{},"subject":[],"published":{"date-parts":[[2021,3]]}}}