{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T06:57:09Z","timestamp":1730271429587,"version":"3.28.0"},"reference-count":54,"publisher":"IEEE","license":[{"start":{"date-parts":[[2022,3,1]],"date-time":"2022-03-01T00:00:00Z","timestamp":1646092800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2022,3,1]],"date-time":"2022-03-01T00:00:00Z","timestamp":1646092800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2022,3]]},"DOI":"10.1109\/irps48227.2022.9764501","type":"proceedings-article","created":{"date-parts":[[2022,5,2]],"date-time":"2022-05-02T16:44:23Z","timestamp":1651509863000},"page":"10A.4-1-10A.4-8","source":"Crossref","is-referenced-by-count":2,"title":["Quantum Mechanical Connection of Schottky Emission Process and Its implications on Breakdown Methodology and Conduction Modeling for BEOL Low-k Dielectrics"],"prefix":"10.1109","author":[{"given":"Ernest","family":"Wu","sequence":"first","affiliation":[{"name":"IBM Research Division,Essex Junction,Vermont,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Baozhen","family":"Li","sequence":"additional","affiliation":[{"name":"IBM System Group,Essex Junction,Vermont,USA"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.1063\/1.124709"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1063\/1.114720"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevB.57.R2081"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.35.140"},{"journal-title":"publication","year":"0","author":"wu","key":"ref31"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1016\/j.microrel.2005.12.006"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2004.826862"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1063\/1.1330764"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1063\/1.1374479"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1063\/1.2799091"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1063\/1.1427398"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1063\/1.365364"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/TDMR.2004.836727"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRev.54.647"},{"key":"ref1","first-page":"872","volume":"15","author":"schottky","year":"1914","journal-title":"Physik Z"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1063\/1.1657043"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1016\/S0040-6090(96)09073-6"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1063\/1.360124"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRev.123.85"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.6.57"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1147\/rd.433.0327"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1063\/1.1654509"},{"key":"ref50","doi-asserted-by":"publisher","DOI":"10.1016\/j.ssc.2009.02.038"},{"key":"ref51","doi-asserted-by":"publisher","DOI":"10.1063\/1.359414"},{"key":"ref54","first-page":"195","author":"wu","year":"2020","journal-title":"IEDM"},{"key":"ref53","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2003.813236"},{"key":"ref52","doi-asserted-by":"publisher","DOI":"10.1063\/1.3151711"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1063\/1.2360893"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1016\/j.microrel.2016.04.004"},{"key":"ref40","doi-asserted-by":"publisher","DOI":"10.1063\/1.345414"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1063\/1.4895135"},{"key":"ref13","doi-asserted-by":"crossref","first-page":"1602","DOI":"10.3390\/ma5091602","volume":"5","author":"wong","year":"2012","journal-title":"Materials"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1088\/2053-1591\/2\/4\/046302"},{"key":"ref15","volume":"5a 2 1","author":"gischia","year":"2010","journal-title":"International Reliability Physics Symposium"},{"key":"ref16","first-page":"173","volume":"a119","author":"fowler","year":"1928","journal-title":"Proc Roy Soc"},{"key":"ref17","volume":"286","author":"richardson","year":"1902","journal-title":"Proc Cambridge Phil Sot II"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRev.102.1464"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1016\/0038-1101(66)90097-9"},{"key":"ref4","first-page":"1","volume":"2014","author":"chiu","year":"2014","journal-title":"Advances in Materials Science and Engineering"},{"journal-title":"Physics of Semiconductor Devices","year":"1981","author":"sze","key":"ref3"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/S0026-2714(01)00248-7"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.3390\/electronics4030586"},{"key":"ref8","first-page":"1","author":"wehring","year":"2020","journal-title":"IRPS"},{"key":"ref7","first-page":"46","author":"chen","year":"2006","journal-title":"IRPS"},{"key":"ref49","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.15.967"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1063\/1.2907958"},{"key":"ref46","doi-asserted-by":"publisher","DOI":"10.1063\/1.1866641"},{"key":"ref45","first-page":"311","volume":"12","author":"xu","year":"2017","journal-title":"Nano Express"},{"key":"ref48","doi-asserted-by":"publisher","DOI":"10.1016\/S0022-3093(02)00967-5"},{"key":"ref47","doi-asserted-by":"publisher","DOI":"10.1063\/1.88046"},{"journal-title":"Electrons and Phonons","year":"1960","author":"ziman","key":"ref42"},{"journal-title":"Introduction to Solid State Physics","year":"1996","author":"kittel","key":"ref41"},{"key":"ref44","doi-asserted-by":"publisher","DOI":"10.1063\/1.1479747"},{"key":"ref43","doi-asserted-by":"publisher","DOI":"10.1116\/1.591472"}],"event":{"name":"2022 IEEE International Reliability Physics Symposium (IRPS)","start":{"date-parts":[[2022,3,27]]},"location":"Dallas, TX, USA","end":{"date-parts":[[2022,3,31]]}},"container-title":["2022 IEEE International Reliability Physics Symposium (IRPS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9764406\/9764408\/09764501.pdf?arnumber=9764501","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,6,14]],"date-time":"2022-06-14T16:41:55Z","timestamp":1655224915000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9764501\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,3]]},"references-count":54,"URL":"https:\/\/doi.org\/10.1109\/irps48227.2022.9764501","relation":{},"subject":[],"published":{"date-parts":[[2022,3]]}}}