{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,6,13]],"date-time":"2025-06-13T06:08:37Z","timestamp":1749794917088,"version":"3.40.5"},"reference-count":17,"publisher":"IEEE","license":[{"start":{"date-parts":[[2024,4,14]],"date-time":"2024-04-14T00:00:00Z","timestamp":1713052800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2024,4,14]],"date-time":"2024-04-14T00:00:00Z","timestamp":1713052800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2024,4,14]]},"DOI":"10.1109\/irps48228.2024.10529305","type":"proceedings-article","created":{"date-parts":[[2024,5,16]],"date-time":"2024-05-16T17:21:48Z","timestamp":1715880108000},"page":"1-5","source":"Crossref","is-referenced-by-count":2,"title":["Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND"],"prefix":"10.1109","author":[{"given":"D.","family":"Tierno","sequence":"first","affiliation":[{"name":"imec,Leuven,Belgium,3001"}]},{"given":"A.","family":"Arreghini","sequence":"additional","affiliation":[{"name":"imec,Leuven,Belgium,3001"}]},{"given":"A.","family":"Lesniewska","sequence":"additional","affiliation":[{"name":"imec,Leuven,Belgium,3001"}]},{"given":"Y.","family":"Jeong","sequence":"additional","affiliation":[{"name":"imec,Leuven,Belgium,3001"}]},{"given":"M. H.","family":"van der Veen","sequence":"additional","affiliation":[{"name":"imec,Leuven,Belgium,3001"}]},{"given":"J.","family":"Stiers","sequence":"additional","affiliation":[{"name":"imec,Leuven,Belgium,3001"}]},{"given":"N.","family":"Bazzazian","sequence":"additional","affiliation":[{"name":"imec,Leuven,Belgium,3001"}]},{"given":"I.","family":"Ciofi","sequence":"additional","affiliation":[{"name":"imec,Leuven,Belgium,3001"}]},{"given":"G.","family":"Van den Bosch","sequence":"additional","affiliation":[{"name":"imec,Leuven,Belgium,3001"}]},{"given":"M.","family":"Rosmeulen","sequence":"additional","affiliation":[{"name":"imec,Leuven,Belgium,3001"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/imw56887.2023.10145825"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/imw52921.2022.9779282"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/led.2013.2253442"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/irps.2019.8720410"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/isscc42613.2021.9365777"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/IMW52921.2022.9779303"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/IITC.2014.6831863"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/IMW48823.2020.9108111"},{"journal-title":"First Demonstration of Ruthenium and Molybdenum Word lines Integrated into 40nm Pitch 3D-NAND Memory Devices","author":"Ajaykumar","key":"ref9"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/IRPS45951.2020.9129246"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/IRPS46558.2021.9405132"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/IRPS.2018.8353551"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/IITC52079.2022.9881322"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/IITC51362.2021.9537545"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/IRPS.2018.8353555"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/IMW56887.2023.10145986"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/IRPS48227.2022.9764503"}],"event":{"name":"2024 IEEE International Reliability Physics Symposium (IRPS)","start":{"date-parts":[[2024,4,14]]},"location":"Grapevine, TX, USA","end":{"date-parts":[[2024,4,18]]}},"container-title":["2024 IEEE International Reliability Physics Symposium (IRPS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/10529283\/10529298\/10529305.pdf?arnumber=10529305","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,5,19]],"date-time":"2025-05-19T17:48:48Z","timestamp":1747676928000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10529305\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,4,14]]},"references-count":17,"URL":"https:\/\/doi.org\/10.1109\/irps48228.2024.10529305","relation":{},"subject":[],"published":{"date-parts":[[2024,4,14]]}}}