{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T07:05:15Z","timestamp":1730271915225,"version":"3.28.0"},"reference-count":5,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/iscas.2003.1205073","type":"proceedings-article","created":{"date-parts":[[2003,11,21]],"date-time":"2003-11-21T01:19:26Z","timestamp":1069377566000},"page":"III-530-III-533","source":"Crossref","is-referenced-by-count":2,"title":["Electrostatical coupling-spring for micro-mechanical filtering applications"],"prefix":"10.1109","volume":"3","author":[{"given":"D.","family":"Galayko","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"A.","family":"Kaiser","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"L.","family":"Buchaillot","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"D.","family":"Collard","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"C.","family":"Combi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","article-title":"High-Q VHF micromechanical","author":"clark","year":"2000","journal-title":"Int Electron Devices Meeting"},{"key":"ref3","first-page":"134","article-title":"Design, realisation and test of micro-mechanical resonators","volume":"13","author":"galayko","year":"2003","journal-title":"IOP ? JMM"},{"journal-title":"Filtres microélectromécaniques micro-usinés","year":"2002","author":"galayko","key":"ref5"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/4.839911"},{"key":"ref1","article-title":"High-order medium frequency","volume":"8","author":"wang","year":"1999","journal-title":"JMEMS"}],"event":{"name":"ISCAS 2003. International Symposium on Circuits and Systems","acronym":"ISCAS-03","location":"Bangkok, Thailand"},"container-title":["Proceedings of the 2003 International Symposium on Circuits and Systems, 2003. ISCAS '03."],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/8570\/27130\/01205073.pdf?arnumber=1205073","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,13]],"date-time":"2017-03-13T17:31:35Z","timestamp":1489426295000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1205073\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":5,"URL":"https:\/\/doi.org\/10.1109\/iscas.2003.1205073","relation":{},"subject":[]}}