{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T07:52:44Z","timestamp":1729669964394,"version":"3.28.0"},"reference-count":8,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/iscas.2003.1205171","type":"proceedings-article","created":{"date-parts":[[2003,11,21]],"date-time":"2003-11-21T01:19:26Z","timestamp":1069377566000},"page":"III-922-III-925","source":"Crossref","is-referenced-by-count":3,"title":["Design, fabrication and modeling of microbeam structures for gas sensor applications in CMOS technology"],"prefix":"10.1109","volume":"3","author":[{"given":"A.","family":"Voiculescu","sequence":"first","affiliation":[]},{"given":"M.","family":"Zaghloul","sequence":"additional","affiliation":[]},{"given":"R.A.","family":"McGill","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"crossref","first-page":"103","DOI":"10.1016\/S0924-4247(97)80100-8","article-title":"Laminated high-aspect-ratio microstructures in a conventional CMOS process","volume":"a57","author":"fedder","year":"1996","journal-title":"Sensors and Actuators"},{"key":"ref3","first-page":"27","article-title":"Choosing polymer coatings for chemical sensors","volume":"24","author":"mcgill","year":"1994","journal-title":"Chemtech"},{"key":"ref6","doi-asserted-by":"crossref","first-page":"346","DOI":"10.1016\/S0924-4247(00)00374-5","article-title":"Laminated, sacrificial-poly MEMS technology in standard CMOS","volume":"85","author":"guillou","year":"2000","journal-title":"Sensors and Actuators"},{"year":"0","key":"ref5"},{"doi-asserted-by":"publisher","key":"ref8","DOI":"10.1109\/16.277330"},{"year":"0","author":"fedder","article-title":"Personal communication","key":"ref7"},{"key":"ref2","doi-asserted-by":"crossref","DOI":"10.1007\/978-3-662-05060-6","article-title":"CMOS cantilever sensor system","author":"lange","year":"2002"},{"doi-asserted-by":"publisher","key":"ref1","DOI":"10.1109\/6.715182"}],"event":{"acronym":"ISCAS-03","name":"ISCAS 2003. International Symposium on Circuits and Systems","location":"Bangkok, Thailand"},"container-title":["Proceedings of the 2003 International Symposium on Circuits and Systems, 2003. ISCAS '03."],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/8570\/27130\/01205171.pdf?arnumber=1205171","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,16]],"date-time":"2017-06-16T02:27:01Z","timestamp":1497580021000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1205171\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":8,"URL":"https:\/\/doi.org\/10.1109\/iscas.2003.1205171","relation":{},"subject":[]}}