{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T12:04:16Z","timestamp":1725451456453},"reference-count":23,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2016,3]]},"DOI":"10.1109\/isqed.2016.7479199","type":"proceedings-article","created":{"date-parts":[[2016,5,26]],"date-time":"2016-05-26T16:27:41Z","timestamp":1464280061000},"page":"192-197","source":"Crossref","is-referenced-by-count":0,"title":["Performance evaluation considering mask misalignment in multiple patterning decomposition"],"prefix":"10.1109","author":[{"given":"Haitong","family":"Tian","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Martin D.F.","family":"Wong","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD.2013.6691116"},{"key":"ref11","doi-asserted-by":"crossref","first-page":"488","DOI":"10.1109\/ICCAD.2008.4681619","article-title":"Overlay aware interconnect and timing variation modeling for double patterning technology","author":"yang","year":"2008","journal-title":"IEEE\/ACM International Conference on Computer-Aided Design"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2010.2049041"},{"journal-title":"Synopsys Inc","article-title":"Design solutions for 20nm and beyond","year":"2012","key":"ref13"},{"key":"ref14","first-page":"82","article-title":"Timing analysis comprehending mask misalignment due to double patterning","author":"nv","year":"2014","journal-title":"ACM International Workshop on Timing Issues in the Specification and Syn of Digital Systems"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1145\/1572471.1572474"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/j.comnet.2015.10.004"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/ICDCSW.2012.61"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/43.486272"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2010.2050157"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD.2008.4681616"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1145\/2463209.2488819"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1145\/2228360.2228579"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD.2011.6105297"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1145\/2463209.2488818"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1145\/2429384.2429396"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1145\/2429384.2429394"},{"key":"ref1","article-title":"Are multi-patterning corners really needed for 16\/14 nm?","author":"chow","year":"2014","journal-title":"EE Times"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD.2013.6691115"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD.2013.6691142"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/ASPDAC.2015.7059006"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1145\/2717764.2717768"},{"journal-title":"Si2 Open Cell Library","year":"0","key":"ref23"}],"event":{"name":"2016 17th International Symposium on Quality Electronic Design (ISQED)","start":{"date-parts":[[2016,3,15]]},"location":"Santa Clara, CA, USA","end":{"date-parts":[[2016,3,16]]}},"container-title":["2016 17th International Symposium on Quality Electronic Design (ISQED)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7470728\/7479140\/07479199.pdf?arnumber=7479199","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,9,8]],"date-time":"2019-09-08T19:02:57Z","timestamp":1567969377000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7479199\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,3]]},"references-count":23,"URL":"https:\/\/doi.org\/10.1109\/isqed.2016.7479199","relation":{},"subject":[],"published":{"date-parts":[[2016,3]]}}}