{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,13]],"date-time":"2025-10-13T19:56:08Z","timestamp":1760385368681,"version":"3.28.0"},"reference-count":43,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,4]]},"DOI":"10.1109\/issnip.2014.6827620","type":"proceedings-article","created":{"date-parts":[[2014,6,20]],"date-time":"2014-06-20T21:55:33Z","timestamp":1403301333000},"page":"1-6","source":"Crossref","is-referenced-by-count":4,"title":["Silicon Nanowires embedded pressure sensor with annularly grooved diaphragm for sensitivity improvement"],"prefix":"10.1109","author":[{"given":"Songsong","family":"Zhang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tao","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chengkuo","family":"Lee","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Liang","family":"Lou","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wei-Mong","family":"Tsang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dim-Lee","family":"Kwong","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/21\/11\/115012"},{"key":"35","doi-asserted-by":"publisher","DOI":"10.1063\/1.3675878"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2011.2182503"},{"key":"36","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2011.2169645"},{"key":"18","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/21\/6\/065008"},{"key":"33","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2002.802905"},{"journal-title":"Theory of Plates and Shells","year":"1970","author":"woinowsky-krieger","key":"15"},{"key":"34","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-012-1691-x"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/23\/22\/225303"},{"key":"39","doi-asserted-by":"publisher","DOI":"10.1109\/16.30935"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1016\/S0957-4158(98)00012-9"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(93)80133-2"},{"key":"37","doi-asserted-by":"publisher","DOI":"10.1063\/1.3693382"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(91)85019-K"},{"key":"38","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/22\/5\/055012"},{"key":"12","doi-asserted-by":"crossref","first-page":"137","DOI":"10.1016\/0924-4247(90)85026-Z","article-title":"Micromachined beamdiaphragm structure improves performances of pressure transducer","volume":"21","author":"min-hang","year":"1990","journal-title":"Sensors and Actuators A Physical"},{"key":"21","first-page":"6","article-title":"A micromirror with cnts hinge fabricated by the integration of cnts film into a mems actuator","volume":"23","author":"van thanh dau","year":"2013","journal-title":"Journal of Micromechanics and Microengineering"},{"key":"20","doi-asserted-by":"publisher","DOI":"10.1002\/smll.201201599"},{"journal-title":"MEMS - Electromechanical Sensors","year":"2004","author":"beeby","key":"43"},{"key":"42","doi-asserted-by":"publisher","DOI":"10.1109\/T-ED.1982.20659"},{"key":"41","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/22\/9\/095008"},{"key":"40","doi-asserted-by":"crossref","first-page":"332","DOI":"10.1016\/j.sna.2008.03.012","article-title":"Pressure nonlinearity of micromachined piezoresistive pressure sensors with thin diaphragms under high residual stresses","volume":"147","author":"albert chiou","year":"2008","journal-title":"Sensors and Actuators A Physical"},{"key":"22","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2006.53"},{"key":"23","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/22\/39\/395701"},{"key":"24","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.105.226802"},{"key":"25","doi-asserted-by":"publisher","DOI":"10.1063\/1.4704564"},{"key":"26","doi-asserted-by":"publisher","DOI":"10.1021\/nl803181x"},{"key":"27","doi-asserted-by":"publisher","DOI":"10.1038\/nature04796"},{"key":"28","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2011.2169931"},{"key":"29","doi-asserted-by":"publisher","DOI":"10.1063\/1.3463456"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/22\/3\/035020"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2011.5969582"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(91)87092-H"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1021\/nl103901a"},{"key":"30","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2012.2194771"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2003.809026"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/22\/3\/035022"},{"key":"32","doi-asserted-by":"publisher","DOI":"10.1109\/JPROC.2009.2013612"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2010.2100031"},{"key":"31","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2012.2214440"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2011.2178117"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1016\/0250-6874(81)80047-9"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/7\/9\/002"}],"event":{"name":"2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP)","start":{"date-parts":[[2014,4,21]]},"location":"Singapore","end":{"date-parts":[[2014,4,24]]}},"container-title":["2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6820824\/6827478\/06827620.pdf?arnumber=6827620","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,22]],"date-time":"2017-06-22T11:19:37Z","timestamp":1498130377000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6827620\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,4]]},"references-count":43,"URL":"https:\/\/doi.org\/10.1109\/issnip.2014.6827620","relation":{},"subject":[],"published":{"date-parts":[[2014,4]]}}}