{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,12]],"date-time":"2026-06-12T19:59:30Z","timestamp":1781294370647,"version":"3.54.1"},"reference-count":47,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"12","license":[{"start":{"date-parts":[[2026,6,15]],"date-time":"2026-06-15T00:00:00Z","timestamp":1781481600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by-nc-nd\/4.0\/"}],"funder":[{"DOI":"10.13039\/100004358","name":"Samsung","doi-asserted-by":"publisher","award":["IO251215-14552-01"],"award-info":[{"award-number":["IO251215-14552-01"]}],"id":[{"id":"10.13039\/100004358","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100004358","name":"Samsung","doi-asserted-by":"publisher","award":["IO221013-02854-01"],"award-info":[{"award-number":["IO221013-02854-01"]}],"id":[{"id":"10.13039\/100004358","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Creative-Pioneering Researchers Program from Seoul National University"},{"name":"Independent and Continuous Research from Seoul National University, National Research Foundation of Korea (NRF) grant funded by the Korea Government [Ministry of Science and ICT (MSIT)]","award":["RS-2023-00213633"],"award-info":[{"award-number":["RS-2023-00213633"]}]},{"name":"Independent and Continuous Research from Seoul National University, National Research Foundation of Korea (NRF) grant funded by the Korea Government [Ministry of Science and ICT (MSIT)]","award":["GTL25021-230"],"award-info":[{"award-number":["GTL25021-230"]}]},{"name":"Administrative Support from the Seoul National Univ. Co-operative Flexible Transformative (SOFT) Foundry Institute at Seoul National University"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Internet Things J."],"published-print":{"date-parts":[[2026,6,15]]},"DOI":"10.1109\/jiot.2026.3677542","type":"journal-article","created":{"date-parts":[[2026,3,27]],"date-time":"2026-03-27T19:52:22Z","timestamp":1774641142000},"page":"26470-26482","source":"Crossref","is-referenced-by-count":0,"title":["Step-Aware Cross-View Transformer for Unsupervised Semiconductor Manufacturing Equipment Anomaly Detection"],"prefix":"10.1109","volume":"13","author":[{"given":"Sunuwe","family":"Kim","sequence":"first","affiliation":[{"name":"Samsung Electronics Company Ltd., Hwaseong-si, Gyeonggi-do, South Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0003-6557-8751","authenticated-orcid":false,"given":"Junho","family":"Hwang","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Institute of Advanced Machines and Design, the Institute of Engineering Research, and Seoul National University Energy Initiative, Seoul National University, Seoul, South Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0939-1696","authenticated-orcid":false,"given":"Sangwook","family":"Park","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Institute of Advanced Machines and Design, the Institute of Engineering Research, and Seoul National University Energy Initiative, Seoul National University, Seoul, South Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref1","volume-title":"The Semiconductor Decade: A Trillion-Dollar Industry","year":"2022"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/tcpmt.2022.3144461"},{"key":"ref3","volume-title":"2025 Global Semiconductor Industry Outlook"},{"key":"ref4","volume-title":"Historical Billings Report","year":"2025"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/isscc49657.2024.10454358"},{"key":"ref6","volume-title":"2024 SIA Factbook","year":"2024"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1017\/9781009003933.035"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.6028\/nist.chips.1000"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/5.149445"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1007\/s11009-007-9016-8"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1080\/00224065.1985.11978945"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1080\/00224065.2023.2282926"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.5772\/56441"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/tcpmt.2019.2956485"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.2307\/1269551"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1002\/for.768"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1007\/s10845-009-0298-2"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1016\/j.asoc.2017.11.034"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1007\/s10845-020-01711-w"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1007\/s10845-013-0791-5"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/tsm.2022.3164904"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/tsm.2011.2154850"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/tase.2022.3141186"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/tsm.2023.3238555"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/cstic49141.2020.9282417"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1007\/s10845-024-02346-x"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1016\/j.ins.2018.05.020"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1007\/s10696-012-9161-4"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/tase.2020.2983061"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1016\/j.cie.2021.107632"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1109\/tsm.2019.2917521"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1109\/access.2024.3375367"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1609\/aaai.v35i12.17325"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1007\/s10489-024-06122-5"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijpe.2024.109275"},{"key":"ref36","article-title":"FNet: Mixing tokens with Fourier transforms","author":"Lee-Thorp","year":"2021","journal-title":"arXiv:2105.03824"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.48550\/ARXIV.1706.03762"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1109\/ijcnn55064.2022.9891914"},{"key":"ref39","volume-title":"Fault Detection Classification Market","year":"2023"},{"key":"ref40","volume-title":"2023 Annual Report.","year":"2024"},{"key":"ref41","doi-asserted-by":"publisher","DOI":"10.14778\/3514061.3514067"},{"key":"ref42","doi-asserted-by":"publisher","DOI":"10.1109\/tnnls.2024.3420818"},{"key":"ref43","doi-asserted-by":"publisher","DOI":"10.1016\/j.rcim.2023.102600"},{"key":"ref44","article-title":"Anomaly transformer: Time series anomaly detection with association discrepancy","author":"Xu","year":"2021","journal-title":"arXiv:2110.02642"},{"key":"ref45","doi-asserted-by":"publisher","DOI":"10.1109\/JIOT.2021.3100509"},{"key":"ref46","doi-asserted-by":"publisher","DOI":"10.1016\/j.knosys.2024.111507"},{"issue":"86","key":"ref47","first-page":"2579","article-title":"Visualizing data using t-SNE","volume":"9","author":"Maaten","year":"2008","journal-title":"J. Mach. Learn. Res."}],"container-title":["IEEE Internet of Things Journal"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/6488907\/11554150\/11456978.pdf?arnumber=11456978","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,6,12]],"date-time":"2026-06-12T19:44:12Z","timestamp":1781293452000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/11456978\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,6,15]]},"references-count":47,"journal-issue":{"issue":"12"},"URL":"https:\/\/doi.org\/10.1109\/jiot.2026.3677542","relation":{},"ISSN":["2327-4662","2372-2541"],"issn-type":[{"value":"2327-4662","type":"electronic"},{"value":"2372-2541","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,6,15]]}}}