{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,21]],"date-time":"2026-01-21T12:21:34Z","timestamp":1768998094912,"version":"3.49.0"},"reference-count":70,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"12","license":[{"start":{"date-parts":[[2010,12,1]],"date-time":"2010-12-01T00:00:00Z","timestamp":1291161600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Proc. IEEE"],"published-print":{"date-parts":[[2010,12]]},"DOI":"10.1109\/jproc.2010.2063411","type":"journal-article","created":{"date-parts":[[2010,9,20]],"date-time":"2010-09-20T18:53:06Z","timestamp":1285008786000},"page":"2076-2094","source":"Crossref","is-referenced-by-count":119,"title":["Mechanical Computing Redux: Relays for Integrated Circuit Applications"],"prefix":"10.1109","volume":"98","author":[{"given":"Vincent","family":"Pott","sequence":"first","affiliation":[]},{"given":"Hei","family":"Kam","sequence":"additional","affiliation":[]},{"given":"Rhesa","family":"Nathanael","sequence":"additional","affiliation":[]},{"given":"Jaeseok","family":"Jeon","sequence":"additional","affiliation":[]},{"given":"Elad","family":"Alon","sequence":"additional","affiliation":[]},{"given":"Tsu-Jae","family":"King Liu","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref70","doi-asserted-by":"publisher","DOI":"10.1063\/1.1901837"},{"key":"ref39","doi-asserted-by":"crossref","first-page":"787","DOI":"10.1126\/science.1060928","article-title":"carbon nanotubes-the route toward applications","volume":"297","author":"baughman","year":"2002","journal-title":"Science"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/19\/8\/085003"},{"key":"ref33","author":"kam","year":"2009","journal-title":"MOSFET replacement devices for energy-efficient digital integrated circuits"},{"key":"ref32","doi-asserted-by":"crossref","DOI":"10.1002\/0471225282","author":"rebeiz","year":"2003","journal-title":"RF MEMS Theory Design and Technology"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2003.818455"},{"key":"ref30","doi-asserted-by":"crossref","DOI":"10.1007\/b117574","author":"senturia","year":"2001","journal-title":"Microsystem Design"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.2009.5424218"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.2009.5424380"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1145\/1687399.1687490"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1063\/1.2892659"},{"key":"ref60","doi-asserted-by":"publisher","DOI":"10.1109\/MMM.2007.907197"},{"key":"ref62","first-page":"151","article-title":"Conduction properties of microscopic gold contact surfaces","volume":"4558","author":"tringe","year":"2001","journal-title":"Proc SPIEInt Soc Opt Eng"},{"key":"ref61","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2010.5442522"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/4\/015"},{"key":"ref63","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/16\/3\/011"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/18\/10\/105011"},{"key":"ref64","first-page":"529","article-title":"scaling and variability analysis of cnt-based nems devices and circuits with implications for process design","author":"dagdour","year":"2008","journal-title":"Proc Int Electron Devices Meeting"},{"key":"ref65","doi-asserted-by":"publisher","DOI":"10.1109\/JPROC.2007.911064"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1063\/1.3216586"},{"key":"ref66","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2005.854287"},{"key":"ref67","doi-asserted-by":"publisher","DOI":"10.1109\/ISSCC.2010.5434010"},{"key":"ref68","doi-asserted-by":"publisher","DOI":"10.1109\/JPROC.1999.752522"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/T-ED.1984.21550"},{"key":"ref69","first-page":"367","article-title":"Nanoelectromechanical systems","author":"roukes","year":"2000","journal-title":"Proc Int Conf Solid-State Sens Actuators"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.1974.1050511"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(02)00337-0"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1111\/j.1551-2916.2008.02421.x"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/CICC.2006.320821"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1063\/1.882324"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1023\/B:JECR.0000034000.11787.90"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2011.2179015"},{"key":"ref25","first-page":"22","article-title":"dual beam actuation of piezoelectric aln rf mems switches integrated with aln contour-mode resonators","author":"sinha","year":"2008","journal-title":"Proc Solid-State Sens Actuators Microsyst Workshop"},{"key":"ref50","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(99)00256-3"},{"key":"ref51","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/18\/4\/045001"},{"key":"ref59","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.49.57"},{"key":"ref58","first-page":"208","article-title":"improvement in mechanical contact reliability with ald tio2 coating","author":"pott","year":"2009","journal-title":"Proc AVS95 Conf"},{"key":"ref57","first-page":"655","article-title":"a possible method for studying fermi surfaces","volume":"21","author":"sharvin","year":"1965","journal-title":"Sov Phys JETP"},{"key":"ref56","doi-asserted-by":"publisher","DOI":"10.1063\/1.1592628"},{"key":"ref55","author":"holm","year":"1999","journal-title":"Electric Contacts Theory and Application"},{"key":"ref54","doi-asserted-by":"publisher","DOI":"10.1109\/APS.2007.4395439"},{"key":"ref53","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2010.2049826"},{"key":"ref52","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2009.2039916"},{"key":"ref10","author":"white","year":"0","journal-title":"A brief history of computing"},{"key":"ref40","doi-asserted-by":"crossref","first-page":"2027","DOI":"10.1021\/nl049053v","article-title":"a three-terminal carbon nanorelay","volume":"4","author":"lee","year":"2004","journal-title":"Nano Lett"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.2007.4418930"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/ICCAD.2008.4681660"},{"key":"ref13","author":"ceruzzi","year":"1998","journal-title":"A History of Modern Computing"},{"key":"ref14","doi-asserted-by":"crossref","first-page":"166","DOI":"10.1016\/j.sna.2003.09.010","article-title":"magnetic mems: key issues and some applications","volume":"109","author":"niarchos","year":"2003","journal-title":"Sens Actuators A"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(01)00606-9"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.1999.746746"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/84.679353"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.1997.635404"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/84.788630"},{"key":"ref4","first-page":"11","article-title":"progress in digital integrated electronics","author":"moore","year":"1975","journal-title":"1975 International Electron Devices Meeting"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/5.371968"},{"key":"ref6","doi-asserted-by":"crossref","first-page":"90","DOI":"10.1145\/1013235.1013265","article-title":"Characterizing and Modeling Minimum Energy Operation for Subthreshold Circuits","author":"calhoun","year":"2004","journal-title":"Proceedings of the 2004 International Symposium on Low Power Electronics and Design LPE"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1147\/rd.462.0169"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1063\/1.114547"},{"key":"ref7","author":"stroscio","year":"1993","journal-title":"Scanning Tunneling Microscopy"},{"key":"ref49","doi-asserted-by":"publisher","DOI":"10.1109\/84.982859"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.2002.1175835"},{"key":"ref46","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2009.04.002"},{"key":"ref45","doi-asserted-by":"publisher","DOI":"10.1109\/22.899010"},{"key":"ref48","doi-asserted-by":"publisher","DOI":"10.1109\/84.735344"},{"key":"ref47","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(01)00589-1"},{"key":"ref42","doi-asserted-by":"publisher","DOI":"10.1063\/1.2126805"},{"key":"ref41","doi-asserted-by":"crossref","first-page":"94","DOI":"10.1126\/science.289.5476.94","article-title":"carbon nanotube-based nonvolatile random access memory for molecular computing","volume":"289","author":"rueckes","year":"2000","journal-title":"Science"},{"key":"ref44","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2000.838618"},{"key":"ref43","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.2009.5424383"}],"container-title":["Proceedings of the IEEE"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5\/5628287\/05575378.pdf?arnumber=5575378","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,6,3]],"date-time":"2023-06-03T11:55:34Z","timestamp":1685793334000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5575378\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,12]]},"references-count":70,"journal-issue":{"issue":"12"},"URL":"https:\/\/doi.org\/10.1109\/jproc.2010.2063411","relation":{},"ISSN":["0018-9219","1558-2256"],"issn-type":[{"value":"0018-9219","type":"print"},{"value":"1558-2256","type":"electronic"}],"subject":[],"published":{"date-parts":[[2010,12]]}}}