{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,28]],"date-time":"2026-03-28T04:50:30Z","timestamp":1774673430459,"version":"3.50.1"},"reference-count":81,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"6","license":[{"start":{"date-parts":[[2017,6,1]],"date-time":"2017-06-01T00:00:00Z","timestamp":1496275200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"funder":[{"DOI":"10.13039\/100006196","name":"Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California, USA,","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100006196","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100000104","name":"National Aeronautics and Space Administration","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100000104","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Proc. IEEE"],"published-print":{"date-parts":[[2017,6]]},"DOI":"10.1109\/jproc.2016.2644985","type":"journal-article","created":{"date-parts":[[2017,1,26]],"date-time":"2017-01-26T15:01:24Z","timestamp":1485442884000},"page":"1139-1150","source":"Crossref","is-referenced-by-count":65,"title":["Micromachined Packaging for Terahertz Systems"],"prefix":"10.1109","volume":"105","author":[{"given":"Goutam","family":"Chattopadhyay","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Theodore","family":"Reck","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Choonsup","family":"Lee","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Cecile","family":"Jung-Kubiak","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref73","doi-asserted-by":"publisher","DOI":"10.1109\/LAWP.2011.2158285"},{"key":"ref72","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2015.2487781"},{"key":"ref71","doi-asserted-by":"publisher","DOI":"10.1051\/0004-6361\/201117124"},{"key":"ref70","doi-asserted-by":"publisher","DOI":"10.1109\/TAP.2011.2143663"},{"key":"ref76","doi-asserted-by":"publisher","DOI":"10.1088\/1748-0221\/6\/06\/P06009"},{"key":"ref77","volume":"7741","author":"britton","year":"2010","journal-title":"Proc SPIE—Int Soc Opt Eng"},{"key":"ref74","doi-asserted-by":"publisher","DOI":"10.1007\/BF02085698"},{"key":"ref39","doi-asserted-by":"publisher","DOI":"10.1109\/MWSYM.2009.5165859"},{"key":"ref75","first-page":"12005","article-title":"Millimeter wave corrugated platelet feeds","volume":"155","author":"gundersen","year":"2009","journal-title":"J Phys Conf Ser Opt Coupling Section"},{"key":"ref38","first-page":"425","article-title":"Practical micromachining techniques for high aspect ratio submillimeter wave components","author":"lubecke","year":"1998","journal-title":"Proc 9th Int Symp Space THz Technol"},{"key":"ref78","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2013.2270300"},{"key":"ref79","doi-asserted-by":"publisher","DOI":"10.1109\/MWSYM.2015.7166718"},{"key":"ref33","article-title":"SU-8 2000 permanent epoxy negative photoresist","year":"2015"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2012.2220136"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1109\/LAWP.2013.2240252"},{"key":"ref30","first-page":"358","article-title":"Laser micromachining of silicon: A new technique for fabricating high quality terahertz waveguide components","author":"walker","year":"1997","journal-title":"Proc 8th Int Symp Space Terahertz Technol"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1109\/LMWC.2011.2158411"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1109\/APS.2008.4619761"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2013.2241389"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1109\/MWSYM.2005.1516623"},{"key":"ref60","doi-asserted-by":"publisher","DOI":"10.1109\/TMTT.2013.2287682"},{"key":"ref62","first-page":"1","article-title":"500-600 GHz submillimeter-wave 3.3 bit RF-MEMS phase shifter integrated in micromachined waveguide","author":"shah","year":"2015","journal-title":"IEEE MTT-S Int Microw Symp Dig"},{"key":"ref61","doi-asserted-by":"publisher","DOI":"10.1109\/IRMMW-THz.2014.6956262"},{"key":"ref63","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2016.2574304"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2014.2382434"},{"key":"ref64","doi-asserted-by":"publisher","DOI":"10.1109\/irmmw-THz.2011.6105028"},{"key":"ref27","first-page":"1","year":"2015"},{"key":"ref65","doi-asserted-by":"publisher","DOI":"10.1109\/MWSYM.2014.6848607"},{"key":"ref66","first-page":"220","article-title":"The ring-centered waveguide flange for submillimeter wavelengths","author":"kerr","year":"2009","journal-title":"Proc 20th Int Symp Space THz Techn"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1117\/12.2014776"},{"key":"ref67","doi-asserted-by":"publisher","DOI":"10.1109\/ARFTG76.2010.5700055"},{"key":"ref68","doi-asserted-by":"publisher","DOI":"10.1109\/TMTT.2007.910092"},{"key":"ref69","doi-asserted-by":"publisher","DOI":"10.1109\/IWAT.2015.7365264"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/TAP.2007.908557"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/22.989974"},{"key":"ref20","article-title":"Method of anisotropically etching silicon","author":"laermer","year":"1996"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/75.205665"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.2005.1497272"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1109\/ICIMW.2008.4665595"},{"key":"ref23","article-title":"A versatile micromachined horn antenna","author":"mann","year":"1997","journal-title":"20th ESTEC Antenna Workshop Millimeter-Wave Antenna Technol Antenna Measure"},{"key":"ref26","first-page":"1","year":"2012"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/ICIMW.2008.4665435"},{"key":"ref50","doi-asserted-by":"publisher","DOI":"10.1109\/LMWC.2007.911978"},{"key":"ref51","doi-asserted-by":"publisher","DOI":"10.1109\/LMWC.2013.2258097"},{"key":"ref59","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2014.2342507"},{"key":"ref58","first-page":"1","article-title":"Compact terahertz instruments for planetary missions","author":"chattopadhyay","year":"2015","journal-title":"Proc Eur Conf Antennas Propagation"},{"key":"ref57","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2016.2593793"},{"key":"ref56","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2000.838533"},{"key":"ref55","doi-asserted-by":"publisher","DOI":"10.1109\/TMTT.2012.2184296"},{"key":"ref54","doi-asserted-by":"crossref","first-page":"1673","DOI":"10.1109\/TMTT.2011.2123112","article-title":"A broadband 900-GHz silicon micromachined two-anode frequency tripler","volume":"59","author":"li","year":"2011","journal-title":"IEEE Trans Microw Theory Techn"},{"key":"ref53","first-page":"23","article-title":"Silicon micromachining technology for passive THz components","author":"lee","year":"2010","journal-title":"Proc Int Symp Space THz Technol"},{"key":"ref52","doi-asserted-by":"publisher","DOI":"10.1109\/IRMMW-THz.2014.6956008"},{"key":"ref10","first-page":"77","article-title":"Atacama large millimeter\/submillimeter array (ALMA)","volume":"539","author":"wooten","year":"2000","journal-title":"Proc IEEE"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2011.2159555"},{"key":"ref40","doi-asserted-by":"publisher","DOI":"10.1109\/TMTT.2008.2008946"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.pss.2006.11.011"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1016\/j.pss.2011.12.004"},{"key":"ref14","author":"gulkis","year":"0","journal-title":"private communication"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/MMM.2014.2356092"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2011.2159556"},{"key":"ref81","doi-asserted-by":"publisher","DOI":"10.1109\/EuMC.2015.7345896"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2015.2397274"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/22.734493"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/ICIMW.2008.4665514"},{"key":"ref80","doi-asserted-by":"publisher","DOI":"10.1109\/CSICS.2015.7314481"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2011.2159561"},{"key":"ref3","article-title":"Heterodyne arrays at submillimeter wavelengths","author":"chattopadhyay","year":"0"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1051\/0004-6361\/201014698"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JPROC.2009.2017106"},{"key":"ref8","doi-asserted-by":"crossref","DOI":"10.1051\/0004-6361\/201014535","article-title":"The photodetector array camera and spectrometer (PACS) on the Herschel space observator","volume":"518","author":"poglitsch","year":"2010","journal-title":"Astron Astrophys"},{"key":"ref7","doi-asserted-by":"crossref","DOI":"10.1051\/0004-6361\/201014519","article-title":"The instrument and its in-flight performance","volume":"518","author":"griffin","year":"2010","journal-title":"Astron Astrophys"},{"key":"ref49","doi-asserted-by":"publisher","DOI":"10.1109\/TTHZ.2013.2282534"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1086\/312856"},{"key":"ref46","doi-asserted-by":"publisher","DOI":"10.1109\/MWSYM.2013.6697722"},{"key":"ref45","doi-asserted-by":"publisher","DOI":"10.1109\/TAP.2012.2201089"},{"key":"ref48","doi-asserted-by":"publisher","DOI":"10.1109\/LMWC.2006.875593"},{"key":"ref47","first-page":"1","article-title":"Compact submillimeter-wave receivers made with semiconductor nano-fabrication technologies","author":"jung","year":"2011","journal-title":"IEEE MTT-S Int Microw Symp Dig"},{"key":"ref42","article-title":"Waveguide band designations","year":"2015"},{"key":"ref41","doi-asserted-by":"publisher","DOI":"10.1109\/IMWS3.2011.6061893"},{"key":"ref44","doi-asserted-by":"publisher","DOI":"10.1109\/MWSYM.2007.380335"},{"key":"ref43","article-title":"Coaxial waveguide microstructures and methods of formation thereof","author":"sherrer","year":"2004"}],"container-title":["Proceedings of the IEEE"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/5\/7931728\/07835145.pdf?arnumber=7835145","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,1,12]],"date-time":"2022-01-12T11:40:41Z","timestamp":1641987641000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7835145\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,6]]},"references-count":81,"journal-issue":{"issue":"6"},"URL":"https:\/\/doi.org\/10.1109\/jproc.2016.2644985","relation":{},"ISSN":["0018-9219","1558-2256"],"issn-type":[{"value":"0018-9219","type":"print"},{"value":"1558-2256","type":"electronic"}],"subject":[],"published":{"date-parts":[[2017,6]]}}}