{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,14]],"date-time":"2026-07-14T12:12:24Z","timestamp":1784031144762,"version":"3.55.0"},"reference-count":28,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"6","license":[{"start":{"date-parts":[[2012,6,1]],"date-time":"2012-06-01T00:00:00Z","timestamp":1338508800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE J. Solid-State Circuits"],"published-print":{"date-parts":[[2012,6]]},"DOI":"10.1109\/jssc.2012.2188466","type":"journal-article","created":{"date-parts":[[2012,4,11]],"date-time":"2012-04-11T19:39:53Z","timestamp":1334173193000},"page":"1394-1407","source":"Crossref","is-referenced-by-count":146,"title":["A Time-Resolved, Low-Noise Single-Photon Image Sensor Fabricated in Deep-Submicron CMOS Technology"],"prefix":"10.1109","volume":"47","author":[{"given":"Marek","family":"Gersbach","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yuki","family":"Maruyama","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Rahmadi","family":"Trimananda","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Matt W.","family":"Fishburn","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"David","family":"Stoppa","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Justin A.","family":"Richardson","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Richard","family":"Walker","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Robert","family":"Henderson","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Edoardo","family":"Charbon","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/j.sse.2009.02.014"},{"key":"ref11","article-title":"A low dark count rate single photon avalanche diode structure compatible with standard nanometer scale CMOS technology","author":"richardson","year":"2009","journal-title":"Int Image Sensor Workshop"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/TNS.2007.903183"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/19.744201"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2009.2017006"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2008.917405"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/4.231325"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/JSTQE.2007.903854"},{"key":"ref18","article-title":"A 32$\\,\\times\\,$<\/tex> <\/formula>32 50 ps resolution 10 bit time to digital converter array in 130 nm CMOS for time correlated imaging","author":"richardson","year":"2009","journal-title":"Proc IEEE Custom Integrated Circuits Conf"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/IEDM.1998.746503"},{"key":"ref28","first-page":"107","article-title":"A 100 m-range 10-frame\/s 340x96-pixel time-of flight depth sensor in 0.18 $\\mu$<\/tex> <\/formula>m CMOS","author":"niclass","year":"2011","journal-title":"Proc Eur Solid-State Circuits Conf"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2006.874281"},{"key":"ref27","article-title":"3D near-infrared imaging based on a SPAD image sensor","author":"mata-pavia","year":"2011","journal-title":"Proc Int Image Sensor Workshop (IISW)"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/4.823449"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2005.848173"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1063\/1.1584083"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2008.2006445"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TCSI.2006.888679"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2004.835832"},{"key":"ref9","article-title":"Fully optimized Cu based process with dedicated cavity etch for 1.75 $\\mu$<\/tex><\/formula>m and 1.45 $\\mu$<\/tex><\/formula>m pixel pitch CMOS image sensors","author":"cohen","year":"2006","journal-title":"Proc Int Electron Devices Meeting (IEDM)"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/JQE.1983.1071905"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2006.883560"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1364\/OE.15.018066"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2007.914839"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1364\/OE.17.015087"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1364\/OE.16.008381"},{"key":"ref26","doi-asserted-by":"publisher","DOI":"10.1109\/ESSCIRC.2009.5325970"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/LPT.2009.2022059"}],"container-title":["IEEE Journal of Solid-State Circuits"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4\/6203507\/06176268.pdf?arnumber=6176268","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,10,10]],"date-time":"2021-10-10T23:53:59Z","timestamp":1633910039000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6176268\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,6]]},"references-count":28,"journal-issue":{"issue":"6"},"URL":"https:\/\/doi.org\/10.1109\/jssc.2012.2188466","relation":{},"ISSN":["0018-9200","1558-173X"],"issn-type":[{"value":"0018-9200","type":"print"},{"value":"1558-173X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2012,6]]}}}