{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,25]],"date-time":"2026-06-25T03:31:06Z","timestamp":1782358266487,"version":"3.54.5"},"reference-count":15,"publisher":"IEEE","license":[{"start":{"date-parts":[[2023,11,21]],"date-time":"2023-11-21T00:00:00Z","timestamp":1700524800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,11,21]],"date-time":"2023-11-21T00:00:00Z","timestamp":1700524800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51775108"],"award-info":[{"award-number":["51775108"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2023,11,21]]},"DOI":"10.1109\/m2vip58386.2023.10413390","type":"proceedings-article","created":{"date-parts":[[2024,2,2]],"date-time":"2024-02-02T18:28:38Z","timestamp":1706898518000},"page":"1-6","source":"Crossref","is-referenced-by-count":1,"title":["Quality Prediction of PECVD Process with Random Forest and Long Short-Term Memory Neural Network"],"prefix":"10.1109","author":[{"given":"Yilei","family":"Fu","sequence":"first","affiliation":[{"name":"School of Mechanical Engineering, Southeast University,Nanjing,China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhisheng","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Southeast University,Nanjing,China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhijie","family":"Xia","sequence":"additional","affiliation":[{"name":"JiangSu Nan Gao Intelligent Equipment Innovation Center,Nanjing,China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Haiying","family":"Wen","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering Southeast University, Engineering Research Center of New Light Sources Technology and Equipment, Ministry of Education,Nanjing,China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Min","family":"Dai","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Southeast University,Nanjing,China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hui","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Southeast University,Nanjing,China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1557\/proc-188-79"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/j.ultras.2019.105981"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1002\/asmb.2278"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/lsp.2021.3080181"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.asoc.2021.107599"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/j.ins.2012.06.016"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1145\/3372454.3372479"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/s0927-0248(01)00052-6"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/j.scitotenv.2022.159360"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/access.2020.2966827"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1016\/j.cie.2021.107371"},{"key":"ref12","volume-title":"StressNet: Hybrid model of LSTM and CNN for stress detection from electroencephalogram signal (EEG)","author":"Alias"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1016\/j.enbuild.2022.111908"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1016\/j.sste.2020.100372"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/j.frl.2021.102280"}],"event":{"name":"2023 29th International Conference on Mechatronics and Machine Vision in Practice (M2VIP)","location":"Queenstown, New Zealand","start":{"date-parts":[[2023,11,21]]},"end":{"date-parts":[[2023,11,24]]}},"container-title":["2023 29th International Conference on Mechatronics and Machine Vision in Practice (M2VIP)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/10413343\/10413344\/10413390.pdf?arnumber=10413390","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,2,6]],"date-time":"2024-02-06T20:53:24Z","timestamp":1707252804000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10413390\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,11,21]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/m2vip58386.2023.10413390","relation":{},"subject":[],"published":{"date-parts":[[2023,11,21]]}}}