{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:04:52Z","timestamp":1730282692514,"version":"3.28.0"},"reference-count":7,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,11]]},"DOI":"10.1109\/mhs.2013.6710403","type":"proceedings-article","created":{"date-parts":[[2014,1,24]],"date-time":"2014-01-24T19:14:13Z","timestamp":1390590853000},"page":"1-3","source":"Crossref","is-referenced-by-count":0,"title":["Thermoelectric thick film patterns formed by using thermally-assisted sputtering method and silicone lift-off masks"],"prefix":"10.1109","author":[{"given":"Mizue","family":"Mizoshiri","sequence":"first","affiliation":[]},{"given":"Masashi","family":"Mikami","sequence":"additional","affiliation":[]},{"given":"Kimihiro","family":"Ozaki","sequence":"additional","affiliation":[]},{"given":"Mitsuhiro","family":"Shikida","sequence":"additional","affiliation":[]},{"given":"Seiichi","family":"Hata","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.45.L1130"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1016\/j.tsf.2005.12.306"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2006.04.054"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/7\/S14"},{"key":"6","volume":"52","author":"mizoshiri","year":"2013","journal-title":"P-Type Sb2Te3 and N-Type Bi2Te 3 Films for Thermoelectric Modules Deposited by Thermally Assisted Sputtering Method"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1007\/s11664-012-2047-0"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2009.11.023"}],"event":{"name":"2013 International Symposium on Micro-NanoMechatronics and Human Science (MHS)","start":{"date-parts":[[2013,11,10]]},"location":"Nagoya, Japan","end":{"date-parts":[[2013,11,13]]}},"container-title":["MHS2013"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6704879\/6710388\/06710403.pdf?arnumber=6710403","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,22]],"date-time":"2017-03-22T22:26:58Z","timestamp":1490221618000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6710403\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,11]]},"references-count":7,"URL":"https:\/\/doi.org\/10.1109\/mhs.2013.6710403","relation":{},"subject":[],"published":{"date-parts":[[2013,11]]}}}