{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T06:34:05Z","timestamp":1725431645719},"reference-count":5,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2014,11]]},"DOI":"10.1109\/mhs.2014.7006094","type":"proceedings-article","created":{"date-parts":[[2015,1,13]],"date-time":"2015-01-13T16:34:54Z","timestamp":1421166894000},"page":"1-4","source":"Crossref","is-referenced-by-count":0,"title":["Two-axis scanning micro mirror device with thick film metallic glass Cu-Zr-Ti and Parylene-C"],"prefix":"10.1109","author":[{"given":"Shigetaka","family":"Watanabe","sequence":"first","affiliation":[]},{"given":"Yutaka","family":"Nakamitsu","sequence":"additional","affiliation":[]},{"given":"Sakurai","family":"Junpei","sequence":"additional","affiliation":[]},{"given":"Mizue","family":"Mizojiri","sequence":"additional","affiliation":[]},{"given":"Seiichi","family":"Hata","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1016\/S1359-6454(01)00181-1"},{"key":"2","first-page":"2014","article-title":"NEW fabrication method of mems thick film mirror device of cu-zr-ti metallic glass","author":"watanabe","year":"2014","journal-title":"Proceedings of the JSME\/ASME 2014\/ ICMP2014"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.4028\/www.scientific.net\/KEM.523-524.787"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.2320\/matertrans1989.39.623"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.2320\/jinstmet.70.816"}],"event":{"name":"2014 International Symposium on Micro-NanoMechatronics and Human Science (MHS)","start":{"date-parts":[[2014,11,10]]},"location":"Nagoya, Japan","end":{"date-parts":[[2014,11,12]]}},"container-title":["2014 International Symposium on Micro-NanoMechatronics and Human Science (MHS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6994137\/7006055\/07006094.pdf?arnumber=7006094","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,24]],"date-time":"2017-03-24T02:21:50Z","timestamp":1490322110000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7006094\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,11]]},"references-count":5,"URL":"https:\/\/doi.org\/10.1109\/mhs.2014.7006094","relation":{},"subject":[],"published":{"date-parts":[[2014,11]]}}}