{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,23]],"date-time":"2025-12-23T05:02:18Z","timestamp":1766466138649},"reference-count":35,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"1","license":[{"start":{"date-parts":[[2004,3,1]],"date-time":"2004-03-01T00:00:00Z","timestamp":1078099200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Robot. Automat. Mag."],"published-print":{"date-parts":[[2004,3]]},"DOI":"10.1109\/mra.2004.1275965","type":"journal-article","created":{"date-parts":[[2004,3,23]],"date-time":"2004-03-23T19:01:11Z","timestamp":1080068471000},"page":"41-58","source":"Crossref","is-referenced-by-count":4,"title":["SECAM"],"prefix":"10.1109","volume":"11","author":[{"family":"Jin-Hwan Lee","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Tae-Eog Lee","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref33","article-title":"Virtual cluster tool for testing and verifying a cluster tool controller and a scheduler","author":"joo","year":"0","journal-title":"IEEE Robot Automat Mag"},{"key":"ref32","year":"1996","journal-title":"The Four Fieldbuses"},{"key":"ref31","year":"1995","journal-title":"SEMATECH Technology Transfer 95042782A-ENG SEMATECH Stepper Specific Equipment Model"},{"key":"ref30","year":"1992","journal-title":"Industrial Automation Systems?Manufacturing Message Specification?Part 4 Companion Standard for Numerical Control"},{"key":"ref35","year":"2000","journal-title":"Provisional Standard for the Object-Based Equipment Model (OBEM)"},{"key":"ref34","first-page":"775","article-title":"An integrated application framework for a cluster tool controller for semiconductor manufacturing","author":"lee","year":"2001","journal-title":"Proc IEEE Int Conf Emerging Technologies and Factory Automation"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/ETFA.1993.396401"},{"key":"ref11","year":"1997","journal-title":"Computer Integrated Manufacturing (CIM) Framework Specification"},{"key":"ref12","doi-asserted-by":"crossref","first-page":"111","DOI":"10.1007\/978-1-4471-2023-0_4","author":"menga","year":"1993","journal-title":"Intelligent Manufacturing Programming Environments for CIM"},{"key":"ref13","year":"2000","journal-title":"Cluster Tools in IC Processing Technology and Market Forecasts"},{"key":"ref14","year":"1997","journal-title":"ClusterLink Module Manager to TM\/PM Application Interface Specifications Document"},{"key":"ref15","year":"1997","journal-title":"ClusterPRO 97 Technical Information Guide Preliminary Version 1 1"},{"key":"ref16","year":"0"},{"key":"ref17","year":"1991","journal-title":"PROFIBUS Standard Part 1 2 3 and 4"},{"key":"ref18","year":"1995","journal-title":"MMS A Communication Language for Manufacturing"},{"key":"ref19","year":"1990","journal-title":"Industrial Automation Systems?Manufacturing Message Specification?Part 1 Service Definition"},{"key":"ref28","year":"2000","journal-title":"Rhapsody Reference Manual"},{"key":"ref4","first-page":"93","author":"castori","year":"1993","journal-title":"Performance evaluation of an MMS event manager"},{"key":"ref27","doi-asserted-by":"publisher","DOI":"10.1016\/0167-6423(87)90035-9"},{"key":"ref3","author":"castori","year":"1993","journal-title":"Dealing with concurrency in MMS servers"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/0166-3615(95)00065-8"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1109\/ROBOT.1995.526029"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/WFCS.1995.482701"},{"key":"ref8","first-page":"231","author":"capobianchi","year":"2000","journal-title":"Domain-Specific Application Frameworks"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/IECON.1998.722922"},{"key":"ref2","year":"1995","journal-title":"Communications environment HSMS\/SECS-II for Cluster Tool Module Communications"},{"key":"ref9","author":"fayad","year":"1999","journal-title":"Building Application Frameworks Object-Oriented Foundations of Framework Design"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/S0166-3615(01)00078-1"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1023\/A:1018921310489"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1007\/978-1-4615-3126-5"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1137\/0325013"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1080\/09511920110078097"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1016\/S0278-6125(98)80025-3"},{"key":"ref26","author":"eriksson","year":"1997","journal-title":"UML Toolkit"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/66.641483"}],"container-title":["IEEE Robotics & Automation Magazine"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/100\/28552\/01275965.pdf?arnumber=1275965","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,1,12]],"date-time":"2022-01-12T16:14:44Z","timestamp":1642004084000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1275965\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2004,3]]},"references-count":35,"journal-issue":{"issue":"1","published-print":{"date-parts":[[2004,3]]}},"URL":"https:\/\/doi.org\/10.1109\/mra.2004.1275965","relation":{},"ISSN":["1070-9932"],"issn-type":[{"value":"1070-9932","type":"print"}],"subject":[],"published":{"date-parts":[[2004,3]]}}}