{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,15]],"date-time":"2025-11-15T17:08:32Z","timestamp":1763226512307,"version":"3.28.0"},"reference-count":17,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2017,8]]},"DOI":"10.1109\/mwscas.2017.8052857","type":"proceedings-article","created":{"date-parts":[[2017,10,24]],"date-time":"2017-10-24T20:21:31Z","timestamp":1508876491000},"page":"49-52","source":"Crossref","is-referenced-by-count":5,"title":["Damping in aluminum nitride contour mode MEMS resonators"],"prefix":"10.1109","author":[{"given":"Jeronimo","family":"Segovia-Fernandez","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms1212"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2016.2539224"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/FCS.2015.7138940"},{"journal-title":"Handbook of Optics Optical Society of America","year":"2000","key":"ref13"},{"key":"ref14","article-title":"Single Crystal Elastic Constants and Calculated Aggregate Properties","author":"simmons","year":"1965","journal-title":"Department of Geology and Geophysics"},{"journal-title":"United States and National Bureau of Standards Critical analysis of the heat-capacity data of the literature and evaluation of thermodynamic properties of copper silver and gold from 0 to 300oK Washington D C U S Dept of Commerce National Bureau of Standards For sale by the Supt of Docs U S G P O","year":"1968","author":"furukawa","key":"ref15"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1007\/BF00534223"},{"key":"ref17","article-title":"Brookhaven National Laboratory selected cryogenic data notebook","author":"jensen","year":"1980","journal-title":"Brookhaven National Laboratory"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2010.1376"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2006.886012"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2015.7051130"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2014.2367418"},{"journal-title":"Attenuation in microwave acoustic transducers and resonators","year":"1969","author":"wauk","key":"ref8"},{"journal-title":"Anelastic Relaxation in Crystalline Solids","year":"1972","author":"nowick","key":"ref7"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/ULTSYM.2007.292"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/PROC.1966.4682"},{"key":"ref9","volume":"2","author":"auld","year":"1990","journal-title":"Acoustic Fields and Waves in Solids"}],"event":{"name":"2017 IEEE 60th International Midwest Symposium on Circuits and Systems (MWSCAS)","start":{"date-parts":[[2017,8,6]]},"location":"Boston, MA, USA","end":{"date-parts":[[2017,8,9]]}},"container-title":["2017 IEEE 60th International Midwest Symposium on Circuits and Systems (MWSCAS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8039346\/8052834\/08052857.pdf?arnumber=8052857","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,10,27]],"date-time":"2017-10-27T21:47:39Z","timestamp":1509140859000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/8052857\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,8]]},"references-count":17,"URL":"https:\/\/doi.org\/10.1109\/mwscas.2017.8052857","relation":{},"subject":[],"published":{"date-parts":[[2017,8]]}}}