{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T00:15:38Z","timestamp":1729642538814,"version":"3.28.0"},"reference-count":19,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068519","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T10:54:23Z","timestamp":1244631263000},"page":"25-28","source":"Crossref","is-referenced-by-count":0,"title":["Tunable MEMS capacitors considering deformation factor"],"prefix":"10.1109","author":[{"family":"Dong-Ming Fang","sequence":"first","affiliation":[]},{"family":"Hai-Xia Zhang","sequence":"additional","affiliation":[]},{"family":"Xiao-Lin Zhao","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"crossref","first-page":"59","DOI":"10.1117\/12.524422","article-title":"extended tuning range rf mems variable capacitors using electrostatic and electrothermal actuators","volume":"5344","author":"girbau","year":"2004","journal-title":"Proc of SPIE"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1109\/4.859516"},{"key":"18","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2006.1627887"},{"key":"15","doi-asserted-by":"publisher","DOI":"10.1109\/22.739251"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1109\/MWSYM.1998.689392"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1109\/22.883875"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1109\/TMTT.2004.823598"},{"year":"0","key":"11"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/16\/9\/007"},{"year":"0","key":"3"},{"key":"2","doi-asserted-by":"crossref","first-page":"159","DOI":"10.1016\/j.sna.2004.04.032","article-title":"an approach to the coupling effect between torsion and bending for electrostatic torsional micromirrors","volume":"115","author":"huanga","year":"2004","journal-title":"Sensors and Actuators A"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/11\/4\/325"},{"year":"0","key":"10"},{"year":"0","key":"7"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/22.883875"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2003.820262"},{"year":"0","key":"4"},{"year":"0","key":"9"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/4.540064"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068519.pdf?arnumber=5068519","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T16:53:18Z","timestamp":1497804798000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068519\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":19,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068519","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}