{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,3]],"date-time":"2024-09-03T17:09:17Z","timestamp":1725383357232},"reference-count":5,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068542","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T14:54:23Z","timestamp":1244645663000},"page":"130-133","source":"Crossref","is-referenced-by-count":0,"title":["SOI-based capacitive micromechanical resonator with submicron gap-spacing"],"prefix":"10.1109","author":[{"given":"Yi","family":"Liu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yaquan","family":"Tang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiaomei","family":"Yu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2004.838383"},{"key":"2","first-page":"837","article-title":"sol-based hf and vhf single-crystal silicon resonators with sub-100 nanometer vertical capacitive gaps","author":"pourkamali","year":"0","journal-title":"Transducers '03"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2004.838387"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/84.870053"},{"key":"4","article-title":"the harpss process for fabrication of nanoprecision silicon electromechanical resonators","author":"no","year":"2001","journal-title":"Proc IEEE Conf on Nanotechnology"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068542.pdf?arnumber=5068542","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,17]],"date-time":"2017-03-17T17:47:25Z","timestamp":1489772845000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068542\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":5,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068542","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}