{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T22:39:36Z","timestamp":1729636776692,"version":"3.28.0"},"reference-count":8,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068543","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T10:54:23Z","timestamp":1244631263000},"page":"134-138","source":"Crossref","is-referenced-by-count":2,"title":["Direct bonding SOI Wafer based MEMS cantilever resonator for trace gas sensor applicaiton"],"prefix":"10.1109","author":[{"given":"Dong","family":"Ying","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Gao","family":"Wei","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"You","family":"Zheng","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/1\/2\/004"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1007\/s00216-004-2694-y"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1063\/1.1763252"},{"article-title":"study on mems chemical gas sensor based on resonating microcantilever","year":"2006","author":"qin","key":"7"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2005.1597653"},{"key":"5","article-title":"mechanical sensors for the nanoworld","author":"lang","year":"2002","journal-title":"Bionanotechnology Workshop and Meeting"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1002\/1616-8984(199808)4:1<3::AID-SEUP3>3.0.CO;2-T"},{"key":"8","doi-asserted-by":"crossref","first-page":"93","DOI":"10.15407\/spqeo2.01.093","article-title":"silicon-on-insulator technology for microelectromechanical applications","volume":"1","author":"usenko","year":"1999","journal-title":"Semiconductor Physics Quantum Electronics and Optoelectronics"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068543.pdf?arnumber=5068543","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,5,19]],"date-time":"2020-05-19T09:27:28Z","timestamp":1589880448000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068543\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":8,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068543","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}