{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T09:12:06Z","timestamp":1729674726691,"version":"3.28.0"},"reference-count":5,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068561","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T14:54:23Z","timestamp":1244645663000},"page":"211-214","source":"Crossref","is-referenced-by-count":0,"title":["Fabrication and vibration analysis of micro-cross beams"],"prefix":"10.1109","author":[{"family":"Wei-Hsin Gau","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Shin-Chun Huang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Yuh-Chung Hu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2003.07.001"},{"key":"2","article-title":"development of a continuous scanning laser doppler vibrometer for vibration mode shape analysis","volume":"53","author":"park","year":"2004","journal-title":"IEE Electronic Library"},{"key":"1","doi-asserted-by":"crossref","first-page":"377","DOI":"10.1016\/S0924-4247(02)00400-4","article-title":"determining the poisson's ratio of thin film materials using resonant method","volume":"103","author":"tsai","year":"2003","journal-title":"Sensors and Actuators A"},{"key":"5","doi-asserted-by":"crossref","first-page":"483","DOI":"10.1016\/j.sna.2005.04.029","article-title":"resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning","author":"filhol","year":"2005","journal-title":"Sensors and Actuators"},{"year":"0","key":"4"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068561.pdf?arnumber=5068561","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T20:53:26Z","timestamp":1497819206000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068561\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":5,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068561","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}