{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:48:46Z","timestamp":1730285326975,"version":"3.28.0"},"reference-count":7,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068571","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T10:54:23Z","timestamp":1244631263000},"page":"253-256","source":"Crossref","is-referenced-by-count":1,"title":["A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers"],"prefix":"10.1109","author":[{"family":"Jianbing Xie","sequence":"first","affiliation":[]},{"family":"Weizheng Yuan","sequence":"additional","affiliation":[]},{"family":"Honglong Chang","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/14\/7\/014"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/13\/5\/335"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1116\/1.589258"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/5\/2\/015"},{"key":"6","first-page":"577","volume":"34","author":"dixit","year":"2006","journal-title":"Effect of SF6 flow rate on the etched surface profile and bottom grass formation in deep reactive ion etching process Journal ofPhysics [J]"},{"year":"0","key":"5"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2006.876660"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068571.pdf?arnumber=5068571","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,17]],"date-time":"2017-03-17T13:04:58Z","timestamp":1489755898000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068571\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":7,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068571","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}