{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,2]],"date-time":"2025-10-02T06:14:55Z","timestamp":1759385695679,"version":"3.28.0"},"reference-count":7,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068575","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T14:54:23Z","timestamp":1244645663000},"page":"270-273","source":"Crossref","is-referenced-by-count":8,"title":["An advantageous fabrication technology to integrate pressure sensor into multi-sensor for micro weather station"],"prefix":"10.1109","author":[{"given":"Cheng","family":"Pang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhan","family":"Zhao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiangang","family":"Zhang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Li","family":"Shi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lidong","family":"Du","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhen","family":"Fang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yonghong","family":"Liu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2004.839650"},{"key":"2","doi-asserted-by":"crossref","first-page":"527","DOI":"10.1016\/S0924-4247(01)00819-6","article-title":"integrated multi-environmental sensing-system for the intelligent data carrier","volume":"97 98","author":"fujita","year":"2002","journal-title":"Sensors and Actuators A"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.2003.1217151"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.4028\/www.scientific.net\/AMR.60-61.68"},{"key":"6","doi-asserted-by":"crossref","first-page":"672","DOI":"10.1016\/j.sna.2008.06.001","article-title":"adhesive bonding with su-8 in a vacuum for capacitive pressure sensor","volume":"147","author":"pang","year":"2008","journal-title":"Sensors and Actuators A"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/ESTC.2006.280194"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1016\/j.microrel.2004.10.019"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068575.pdf?arnumber=5068575","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T20:53:21Z","timestamp":1497819201000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068575\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":7,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068575","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}