{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T20:44:35Z","timestamp":1729629875543,"version":"3.28.0"},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068596","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T14:54:23Z","timestamp":1244645663000},"page":"363-366","source":"Crossref","is-referenced-by-count":0,"title":["Diffraction angle prediction of surface micromachined planar curved grating and crossed grating"],"prefix":"10.1109","author":[{"given":"Kuan-Yu","family":"Chen","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ju-Nan","family":"Kuo","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/6668.969936"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/5.649660"},{"key":"10","volume":"11","author":"carter","year":"2005","journal-title":"PolyMUMPs Design Handbook Revision"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/5.704276"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1063\/1.114744"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.44.L668"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/68.803057"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/68.803057"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1109\/JSTQE.2004.828491"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1364\/OL.17.000688"},{"key":"11","doi-asserted-by":"crossref","first-page":"5075","DOI":"10.1364\/AO.37.005075","article-title":"crossed phase gratins with diffractive optical elements","volume":"37","author":"rockward","year":"1998","journal-title":"Applied Optics"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1364\/OL.23.000491"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068596.pdf?arnumber=5068596","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T20:53:25Z","timestamp":1497819205000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068596\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068596","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}