{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T19:14:11Z","timestamp":1729624451932,"version":"3.28.0"},"reference-count":25,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068600","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T14:54:23Z","timestamp":1244645663000},"page":"380-384","source":"Crossref","is-referenced-by-count":2,"title":["Effect of pressure on the Q factor and the resonance frequency of SiN microcantilevers"],"prefix":"10.1109","author":[{"given":"Khashayar Babaei","family":"Gavan","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Joost","family":"van der Heijden","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Emile W. J. M.","family":"van der Drift","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Herre S. J.","family":"van der Zant","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"publisher","DOI":"10.1063\/1.1449534"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRev.52.230"},{"key":"18","doi-asserted-by":"crossref","first-page":"1243041","DOI":"10.1063\/1.2204829","article-title":"high quality factor resonance at room temperature with nanostringsunder high tensile stress","volume":"99","author":"verbridge","year":"2006","journal-title":"J App Phys"},{"key":"15","doi-asserted-by":"crossref","first-page":"23517","DOI":"10.1063\/1.1821638","article-title":"mechanical dissipation in tetrahedral amorphous carbon","volume":"97","author":"czaplewski","year":"2005","journal-title":"J App Phys"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevB.61.5600"},{"key":"13","article-title":"effect of undercut on the resonant behavior of silicon nitride cantilever","author":"babaei gavan","year":"0","journal-title":"J Micromech Microeng"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1126\/science.161.3848.1320"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/1\/018"},{"key":"12","doi-asserted-by":"crossref","first-page":"149","DOI":"10.1016\/S0924-4247(96)01397-0","article-title":"optimization of a low-stress silicon nitride process for surface-micromachining applications","volume":"58","author":"french","year":"1997","journal-title":"Sensors and Actuators A"},{"key":"21","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2008.916321"},{"key":"20","doi-asserted-by":"crossref","first-page":"4543","DOI":"10.1103\/PhysRevB.69.045403","article-title":"temperature dependence of the force sensitivity of silicon cantilevers","volume":"69","author":"gysin","year":"2004","journal-title":"Phys Rev B"},{"key":"22","doi-asserted-by":"crossref","first-page":"36307","DOI":"10.1103\/PhysRevE.69.036307","article-title":"effect of fluid on the q factor and resonance frequency of oscillating micrometer and nanometer scale beams","volume":"69","author":"bhiladvala","year":"2004","journal-title":"Phys Rev B"},{"key":"23","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/12\/3\/322"},{"key":"24","doi-asserted-by":"crossref","first-page":"87","DOI":"10.1016\/0924-4247(95)01003-J","article-title":"damping characteristics of beamshaped micro-oscillators","volume":"49","author":"hosaka","year":"1995","journal-title":"Sens Actuators A"},{"key":"25","doi-asserted-by":"crossref","first-page":"44908","DOI":"10.1063\/1.2654274","article-title":"frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope: arbitrary mode order","volume":"101","author":"van eysden","year":"2007","journal-title":"J Appl Phys"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1063\/1.2193347"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1016\/0042-207X(96)00146-7"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1116\/1.586300"},{"year":"0","key":"1"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1063\/1.359562"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2006.208"},{"key":"5","doi-asserted-by":"crossref","first-page":"13362","DOI":"10.1073\/pnas.0602022103","article-title":"anomalous resonance in a nanomechanical biosensor","volume":"103","author":"gupta","year":"2006","journal-title":"PNAS"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1063\/1.1794378"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1063\/1.1463720"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1063\/1.1993771"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068600.pdf?arnumber=5068600","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T20:53:26Z","timestamp":1497819206000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068600\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":25,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068600","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}