{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T05:56:55Z","timestamp":1729663015288,"version":"3.28.0"},"reference-count":17,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068608","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T10:54:23Z","timestamp":1244631263000},"page":"416-419","source":"Crossref","is-referenced-by-count":0,"title":["SiN-based micro cantilever actuators using NdFeB\/Ta permanent magnetic thin film"],"prefix":"10.1109","author":[{"family":"Sen Yao","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Shunji Goto","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Junpei Sakurai","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tadahiko","family":"Shinshi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Minoru","family":"Uehara","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hitoshi","family":"Yamamoto","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"17","doi-asserted-by":"publisher","DOI":"10.1016\/j.actamat.2007.03.022"},{"key":"15","article-title":"thin film smco magnets for use in electromagnetic microactuators","volume":"99","author":"buddea","year":"2006","journal-title":"J Appl Phys"},{"key":"16","doi-asserted-by":"crossref","first-page":"53913","DOI":"10.1063\/1.2266247","article-title":"microstructure and magnetic properties of smco5 thin films deposited on cu and pt underlayers","volume":"100","author":"takahashi","year":"2006","journal-title":"J Appl Phys"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1016\/j.jmmm.2004.06.047"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.2005.854868"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/84.749396"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/84.982866"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1016\/S0925-4005(01)00683-9"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(99)00378-7"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(99)00051-5"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1109\/20.764895"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2003.817890"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/84.679383"},{"key":"5","doi-asserted-by":"crossref","first-page":"83","DOI":"10.1016\/S0924-4247(02)00322-9","article-title":"development of a bi-directional valve-less silicon micro pump controlled by driving waveform","volume":"103","author":"hayamizu","year":"2003","journal-title":"Sens Actuators A"},{"key":"4","doi-asserted-by":"crossref","first-page":"183","DOI":"10.1016\/S0924-4247(99)00382-9","article-title":"mems micro-valve for space applications","volume":"83","author":"chakraborty","year":"2000","journal-title":"Sens Actuators A"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1002\/mop.22195"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200701667"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068608.pdf?arnumber=5068608","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T16:53:19Z","timestamp":1497804799000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068608\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":17,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068608","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}