{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T20:18:21Z","timestamp":1729628301170,"version":"3.28.0"},"reference-count":15,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068629","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T10:54:23Z","timestamp":1244631263000},"page":"506-509","source":"Crossref","is-referenced-by-count":3,"title":["The method of prevent footing effect in making SOI micro-mechanical structure"],"prefix":"10.1109","author":[{"family":"Xu Mao","sequence":"first","affiliation":[]},{"family":"Zhenchuan Yang","sequence":"additional","affiliation":[]},{"family":"Zhihong Li","sequence":"additional","affiliation":[]},{"family":"Guizhen Yan","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"year":"2004","author":"xiang","key":"15"},{"key":"13","doi-asserted-by":"crossref","first-page":"2003","DOI":"10.1088\/0960-1317\/15\/11\/003","volume":"15","author":"chul lee","year":"2005","journal-title":"J Micromech Microeng"},{"key":"14","first-page":"184","author":"wang","year":"2006","journal-title":"Asia-Pacific Conference of Transducers and Micro-Nano Technology-APCOT"},{"year":"2005","author":"kiihama?ki","key":"11"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1063\/1.350241"},{"key":"3","first-page":"5","volume":"4559","author":"kranz","year":"2001","journal-title":"Proceedings ofSPIE"},{"key":"2","doi-asserted-by":"crossref","first-page":"93","DOI":"10.15407\/spqeo2.01.093","author":"usenko","year":"1999","journal-title":"Semiconductor Physics Quantum Eectronics & Optoelectronics"},{"key":"1","doi-asserted-by":"crossref","first-page":"680","DOI":"10.1016\/S0924-0136(02)00744-6","volume":"130 131","author":"kim","year":"2002","journal-title":"Journal of Materials Processing Technology"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1116\/1.589258"},{"key":"7","doi-asserted-by":"crossref","first-page":"236","DOI":"10.1016\/j.sna.2004.01.022","volume":"114","author":"kiml","year":"2004","journal-title":"Sensors and Actuators A"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1149\/1.1391611"},{"year":"0","key":"5"},{"key":"4","doi-asserted-by":"crossref","first-page":"239","DOI":"10.1016\/S0924-4247(01)00732-4","volume":"a 95","author":"geiger","year":"2002","journal-title":"Sensors and Auctuators"},{"key":"9","doi-asserted-by":"crossref","first-page":"93","DOI":"10.15407\/spqeo2.01.093","volume":"1","author":"usenko","year":"1999","journal-title":"Semiconductor Physics Quantum Eectronics & Optoelectronics"},{"article-title":"method and apparatus for etching a substrate","year":"2001","author":"hopkins","key":"8"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068629.pdf?arnumber=5068629","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,5,19]],"date-time":"2020-05-19T09:28:29Z","timestamp":1589880509000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068629\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068629","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}