{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T15:26:25Z","timestamp":1729610785401,"version":"3.28.0"},"reference-count":13,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068656","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T10:54:23Z","timestamp":1244631263000},"page":"616-619","source":"Crossref","is-referenced-by-count":0,"title":["A high sensitivity quartz tuning fork temperature sensor"],"prefix":"10.1109","author":[{"family":"Jun Xu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Bo You","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Xin Li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Jing Ma","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"13","first-page":"1931","article-title":"wet etching of lgs crystals in h3po4 h2o - characterization of anisotropy and simulation","author":"tellier","year":"2006","journal-title":"Proc IEEE Ultras Symp"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1016\/j.vacuum.2003.12.156"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1023\/A:1016566718494"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2001.923590"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/58.20453"},{"year":"0","key":"1"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1016\/S0026-2714(00)00004-4"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1119\/1.2711826"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2001.923588"},{"key":"5","doi-asserted-by":"crossref","first-page":"370","DOI":"10.3390\/s8010370","article-title":"a review of interface electronic systems for at-cut quartz crystal microbalance application in liquids","volume":"8","author":"arnau","year":"2008","journal-title":"SENSORS"},{"year":"0","key":"4"},{"key":"9","doi-asserted-by":"crossref","first-page":"35","DOI":"10.1016\/0924-4247(92)80194-8","article-title":"mirco resonant force gagues","volume":"30","author":"tilmans","year":"1992","journal-title":"Sensors and Actuators A"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/FREQ.2008.4623014"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068656.pdf?arnumber=5068656","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T16:53:26Z","timestamp":1497804806000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068656\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068656","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}