{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,7,4]],"date-time":"2025-07-04T05:33:45Z","timestamp":1751607225495,"version":"3.28.0"},"reference-count":4,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068688","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T10:54:23Z","timestamp":1244631263000},"page":"754-757","source":"Crossref","is-referenced-by-count":7,"title":["Design and modeling of an electromagnetically excited silicon nitride beam resonant pressure sensor"],"prefix":"10.1109","author":[{"given":"Deyong","family":"Chen","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhengwei","family":"Wu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiaojing","family":"Shi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Junbo","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lei","family":"Liu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(90)87041-G"},{"key":"2","first-page":"664","author":"peterson","year":"1991","journal-title":"Resonant beam pressure sensor fabricated with silicon fusion bonding Tech Digest 6th int Conf Solid-State Sensors and Actuators Tranducers"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1016\/0250-6874(89)87098-2"},{"key":"4","doi-asserted-by":"crossref","first-page":"548","DOI":"10.1117\/12.425398","article-title":"thermally excited sin beam resonant pressure sensor","volume":"4408","author":"chen","year":"2001","journal-title":"Proceedings of SPIE"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068688.pdf?arnumber=5068688","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T16:53:26Z","timestamp":1497804806000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068688\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":4,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068688","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}