{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T05:59:42Z","timestamp":1725429582090},"reference-count":7,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068689","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T14:54:23Z","timestamp":1244645663000},"page":"758-762","source":"Crossref","is-referenced-by-count":3,"title":["On the mechanical behavior of LIGA nickel"],"prefix":"10.1109","author":[{"given":"Guang","family":"He","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Geng-Chen","family":"Shi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"journal-title":"Macro LIGA fabrication of mechanical structures (Book style with paper title and editor)","year":"2003","author":"ya dong liu","key":"3"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1117\/12.284550"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.1997.613722"},{"key":"7","first-page":"57","article-title":"simulation, fabrication and characterization of planar microsprings","author":"chen","year":"2003"},{"year":"0","key":"6"},{"key":"5","first-page":"607","article-title":"mechanical properties of liga depositedtestnickel for mems transducers","author":"sharpe jr","year":"1997","journal-title":"Transducers 1997 International Conference on Solid State Sensors and Actuators"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1007\/s005420050044"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068689.pdf?arnumber=5068689","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,17]],"date-time":"2017-03-17T17:39:58Z","timestamp":1489772398000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068689\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":7,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068689","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}