{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T22:38:36Z","timestamp":1729636716795,"version":"3.28.0"},"reference-count":10,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068723","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T10:54:23Z","timestamp":1244631263000},"page":"915-918","source":"Crossref","is-referenced-by-count":1,"title":["Growth and characterization of PZT thin films with A Pt\/Ti layer on silicon substrate"],"prefix":"10.1109","author":[{"family":"Yi Zhang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Daqun Bao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Hang Guo","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"crossref","first-page":"302","DOI":"10.1016\/S0924-4247(02)00037-7","article-title":"arrayed ultrasonic microsensors with high directivity for in-air use using pzt thin film on silicon diaphragms","volume":"97 98","author":"yamshita","year":"2002","journal-title":"Sens Actuators A"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1016\/S0955-2219(98)00442-7"},{"key":"10","doi-asserted-by":"crossref","first-page":"1043","DOI":"10.1557\/JMR.1997.0145","article-title":"4), a study on the microstructure of preferred orientation oflead zirconate titanate (pzt) thin films","volume":"12","author":"chang jung","year":"1997","journal-title":"J Mater Res"},{"year":"0","key":"1"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1063\/1.366632"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1080\/10584589208215563"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1016\/S0040-6090(03)00926-X"},{"key":"4","doi-asserted-by":"crossref","first-page":"2977","DOI":"10.1016\/j.jeurceramsoc.2003.10.007","article-title":"effect of pyrolysis temperature on preferential orientation and electrical properties of sol-gel derived lead zirconate titanate films","volume":"24","author":"wen","year":"2004","journal-title":"Journal of the European Ceramic Society"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1107\/S0021889804029516"},{"year":"0","key":"8"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068723.pdf?arnumber=5068723","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T16:53:22Z","timestamp":1497804802000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068723\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068723","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}