{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T15:43:32Z","timestamp":1729611812250,"version":"3.28.0"},"reference-count":15,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1109\/nems.2009.5068751","type":"proceedings-article","created":{"date-parts":[[2009,6,10]],"date-time":"2009-06-10T14:54:23Z","timestamp":1244645663000},"page":"1040-1042","source":"Crossref","is-referenced-by-count":3,"title":["Extreme-low-power thermal convective accelerometer based on CNT sensing element"],"prefix":"10.1109","author":[{"family":"Yu Zhang","sequence":"first","affiliation":[]},{"given":"Wen J.","family":"Li","sequence":"additional","affiliation":[]},{"family":"Osamu Tabata","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"year":"0","key":"15"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2005.1453914"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2008.4484436"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/TNANO.2004.834156"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2005.1597755"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1016\/S0026-2692(02)00194-5"},{"key":"2","doi-asserted-by":"crossref","first-page":"125","DOI":"10.1016\/S0924-4247(01)00824-X","article-title":"micromachined inclinometer with high sensitivity and very good stability","volume":"97","author":"billat","year":"2002","journal-title":"Sensors & Actuators A Physical"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.1998.659830"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1115\/FEDSM2003-45067"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2005.856651"},{"key":"6","doi-asserted-by":"crossref","first-page":"78","DOI":"10.1016\/j.sna.2006.04.057","article-title":"experimental and finite-element study of convective accelerometer on cmos","volume":"132","author":"chaehoi","year":"2006","journal-title":"Sensors & Actuators A Physical"},{"key":"5","doi-asserted-by":"crossref","first-page":"848","DOI":"10.1109\/ICSENS.2004.1426303","article-title":"a cmos compatible thermal accelerometer without solid proof mass, based on porous silicon thermal isolation","author":"goustouridis","year":"2004","journal-title":"Proceedings of IEEE Sensors 2004"},{"key":"4","doi-asserted-by":"crossref","first-page":"359","DOI":"10.1016\/S0924-4247(02)00428-4","article-title":"micromachined thermal accelerometer","volume":"103","author":"mailly","year":"2003","journal-title":"Sensors & Actuators A Physical"},{"key":"9","first-page":"769","article-title":"dependence of ac electrophoresis carbon nanotube manipulation on microelectrode geometry","volume":"3","author":"sing","year":"2002","journal-title":"International Journal of Nonlinear Sciences and Numerical Simulation"},{"key":"8","doi-asserted-by":"crossref","first-page":"178","DOI":"10.1016\/j.sna.2007.07.034","article-title":"hdl modeling of convective accelerometers for system design and optimization","volume":"142","author":"leman","year":"2008","journal-title":"Sensors & Actuators A Physical"}],"event":{"name":"2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems","start":{"date-parts":[[2009,1,5]]},"location":"Shenzhen, China","end":{"date-parts":[[2009,1,8]]}},"container-title":["2009 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4982489\/5068512\/05068751.pdf?arnumber=5068751","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,18]],"date-time":"2017-06-18T20:53:24Z","timestamp":1497819204000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5068751\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/nems.2009.5068751","relation":{},"subject":[],"published":{"date-parts":[[2009]]}}}