{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:49:21Z","timestamp":1730285361146,"version":"3.28.0"},"reference-count":5,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010,1]]},"DOI":"10.1109\/nems.2010.5592157","type":"proceedings-article","created":{"date-parts":[[2010,10,1]],"date-time":"2010-10-01T20:09:54Z","timestamp":1285963794000},"page":"88-92","source":"Crossref","is-referenced-by-count":0,"title":["Systematic error analysis and modeling of MEMS close-loop capacitive accelerometer"],"prefix":"10.1109","author":[{"family":"Gang Dai","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Hongming Yu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Wei Su","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Beibei Shao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Mei Li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.3901\/JME.2006.12.128"},{"key":"ref3","first-page":"201","article-title":"Closed-loop system bias in a capacitive micro-accelerometer","volume":"45","author":"wu","year":"2005","journal-title":"Journal of Tsinghua University(Science and Technology)"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2006.886995"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/HKEDM.1999.836415"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/PLANS.1998.670218"}],"event":{"name":"2010 5th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS 2010)","start":{"date-parts":[[2010,1,20]]},"location":"Xiamen","end":{"date-parts":[[2010,1,23]]}},"container-title":["2010 IEEE 5th International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5583931\/5592106\/05592157.pdf?arnumber=5592157","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,21]],"date-time":"2017-03-21T02:59:35Z","timestamp":1490065175000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5592157\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,1]]},"references-count":5,"URL":"https:\/\/doi.org\/10.1109\/nems.2010.5592157","relation":{},"subject":[],"published":{"date-parts":[[2010,1]]}}}