{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T05:35:16Z","timestamp":1729661716675,"version":"3.28.0"},"reference-count":11,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010,1]]},"DOI":"10.1109\/nems.2010.5592164","type":"proceedings-article","created":{"date-parts":[[2010,10,1]],"date-time":"2010-10-01T16:09:54Z","timestamp":1285949394000},"page":"138-140","source":"Crossref","is-referenced-by-count":0,"title":["Residual stress characterization of GaN microstructures using bent-beam strain sensors"],"prefix":"10.1109","author":[{"family":"Jianan Lv","sequence":"first","affiliation":[]},{"family":"Zhenchuan Yang","sequence":"additional","affiliation":[]},{"family":"Guizhen Yan","sequence":"additional","affiliation":[]},{"family":"Yong Cai","sequence":"additional","affiliation":[]},{"family":"Baoshun Zhang","sequence":"additional","affiliation":[]},{"given":"Kevin J","family":"Chen","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","first-page":"307","article-title":"GaN on patterned silicon (GPS) technique for GaN-based integrated microsensors","author":"yang","year":"2005","journal-title":"IEDM Tech Digest"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1063\/1.2167813"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1063\/1.3005885"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1063\/1.2472558"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/84.485216"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2006.872918"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1063\/1.2713089"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1063\/1.3002296"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1088\/0022-3727\/40\/20\/S19"},{"key":"ref9","doi-asserted-by":"crossref","first-page":"1045","DOI":"10.1109\/LED.2009.2028905","article-title":"Fabrication of Large-area Suspended MEMS Structures Using GaN-on-Si Platform","volume":"30","author":"lv","year":"2009","journal-title":"IEEE Electron Devic Lett"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/S0927-796X(00)00028-0"}],"event":{"name":"2010 5th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS 2010)","start":{"date-parts":[[2010,1,20]]},"location":"Xiamen","end":{"date-parts":[[2010,1,23]]}},"container-title":["2010 IEEE 5th International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5583931\/5592106\/05592164.pdf?arnumber=5592164","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,19]],"date-time":"2017-06-19T10:42:19Z","timestamp":1497868939000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5592164\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,1]]},"references-count":11,"URL":"https:\/\/doi.org\/10.1109\/nems.2010.5592164","relation":{},"subject":[],"published":{"date-parts":[[2010,1]]}}}