{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,17]],"date-time":"2025-10-17T13:37:17Z","timestamp":1760708237681,"version":"3.28.0"},"reference-count":19,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010,1]]},"DOI":"10.1109\/nems.2010.5592165","type":"proceedings-article","created":{"date-parts":[[2010,10,1]],"date-time":"2010-10-01T16:09:54Z","timestamp":1285949394000},"page":"122-128","source":"Crossref","is-referenced-by-count":1,"title":["Robust control of nonlinear MEMS optical switch based on quantitative feedback theory"],"prefix":"10.1109","author":[{"given":"Z K","family":"Torabi","sequence":"first","affiliation":[]},{"given":"M","family":"Vali","sequence":"additional","affiliation":[]},{"given":"B","family":"Ebrahimi","sequence":"additional","affiliation":[]},{"given":"M","family":"Bahrami","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"journal-title":"Mechanical Microsensors","year":"2001","author":"elswenpoek","key":"ref10"},{"journal-title":"Microsystem Design","year":"2000","author":"senturia","key":"ref11"},{"journal-title":"Quantitative Feedback Design of Linear and Non-linear Control Systems","year":"1998","author":"yaniv","key":"ref12"},{"journal-title":"Synthesis of Feedback Systems","year":"1963","author":"horowitz","key":"ref13"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1080\/00207177208932261"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1080\/00207177808922376"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1080\/00207179108953619"},{"key":"ref17","volume":"1","author":"horowitz","year":"1992","journal-title":"Quantitative Feedback Design Theory (QFT)"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1080\/00207178208932925"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1002\/rnc.4590030103"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/CDC.2006.377521"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/CDC.2004.1428930"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/EPEPEMC.2008.4635577"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1088\/1742-6596\/34\/1\/120"},{"key":"ref8","doi-asserted-by":"crossref","first-page":"286","DOI":"10.1016\/S0924-4247(02)00401-6","article-title":"Advanced Fiber Optical Switches Using Deep RIE (DRIE) fabrication","volume":"102","author":"li","year":"2003","journal-title":"Sensors and Actuators A"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/13\/3\/308"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/2944.748100"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/68.803057"},{"journal-title":"Analytical Dynamics","year":"1999","author":"baruh","key":"ref9"}],"event":{"name":"2010 5th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS 2010)","start":{"date-parts":[[2010,1,20]]},"location":"Xiamen","end":{"date-parts":[[2010,1,23]]}},"container-title":["2010 IEEE 5th International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5583931\/5592106\/05592165.pdf?arnumber=5592165","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,19]],"date-time":"2017-06-19T10:42:19Z","timestamp":1497868939000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5592165\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,1]]},"references-count":19,"URL":"https:\/\/doi.org\/10.1109\/nems.2010.5592165","relation":{},"subject":[],"published":{"date-parts":[[2010,1]]}}}