{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T21:53:44Z","timestamp":1729634024259,"version":"3.28.0"},"reference-count":16,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010,1]]},"DOI":"10.1109\/nems.2010.5592439","type":"proceedings-article","created":{"date-parts":[[2010,10,1]],"date-time":"2010-10-01T20:09:54Z","timestamp":1285963794000},"page":"479-482","source":"Crossref","is-referenced-by-count":1,"title":["Application of parallel capacitor for force transferring in resonant micro accelerometer"],"prefix":"10.1109","author":[{"family":"Wu Zhou","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Wei Su","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Xiao-Ping He","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Bai-Lin Li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Li-Li Chen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"doi-asserted-by":"publisher","key":"ref10","DOI":"10.1109\/IROS.1995.526167"},{"doi-asserted-by":"publisher","key":"ref11","DOI":"10.1109\/3516.558852"},{"key":"ref12","first-page":"633","article-title":"An electrostatically actuated MEMS switch for power applications","author":"wong","year":"2000","journal-title":"Proc IEEE MEMS 2000 Conf"},{"doi-asserted-by":"publisher","key":"ref13","DOI":"10.1016\/j.sna.2003.12.012"},{"key":"ref14","doi-asserted-by":"crossref","first-page":"376","DOI":"10.1016\/j.sna.2007.10.036","article-title":"A simple method for calculation of the pull-in voltage and touch-point pressure for the small deflection of square diaphragm in MEMS [J]","volume":"141","author":"sharma","year":"2008","journal-title":"Sensors and Actuators A"},{"doi-asserted-by":"publisher","key":"ref15","DOI":"10.1016\/j.elstat.2006.09.001"},{"doi-asserted-by":"publisher","key":"ref16","DOI":"10.1016\/j.mcm.2005.06.001"},{"doi-asserted-by":"publisher","key":"ref4","DOI":"10.1109\/SENSOR.1997.635236"},{"key":"ref3","first-page":"512","article-title":"Folded Silicon Resonant Accelerometer with Temperature Compensation","volume":"1","author":"he","year":"2004","journal-title":"SENSORS"},{"key":"ref6","first-page":"172","article-title":"Inertial-grade Out-of-plane and In-plane Differential Resonant Silicon Accelerometers","author":"kim","year":"2005","journal-title":"Digest Tech Papers Transducers '05 Conference"},{"doi-asserted-by":"publisher","key":"ref5","DOI":"10.1109\/JSEN.2005.857876"},{"doi-asserted-by":"publisher","key":"ref8","DOI":"10.1109\/16.8814"},{"key":"ref7","doi-asserted-by":"crossref","first-page":"687","DOI":"10.1109\/SENSOR.1995.721925","article-title":"Highly Reliable Silicon Micro-Machined Physical Sensors in Mass Production","author":"sasayama","year":"1995","journal-title":"IEEE TRANSDUCERS 95"},{"doi-asserted-by":"publisher","key":"ref2","DOI":"10.1109\/84.506200"},{"doi-asserted-by":"publisher","key":"ref9","DOI":"10.1109\/MEMSYS.1989.77961"},{"doi-asserted-by":"publisher","key":"ref1","DOI":"10.1109\/JMEMS.2002.805207"}],"event":{"name":"2010 5th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS 2010)","start":{"date-parts":[[2010,1,20]]},"location":"Xiamen","end":{"date-parts":[[2010,1,23]]}},"container-title":["2010 IEEE 5th International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5583931\/5592106\/05592439.pdf?arnumber=5592439","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,6,5]],"date-time":"2019-06-05T05:22:08Z","timestamp":1559712128000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5592439\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,1]]},"references-count":16,"URL":"https:\/\/doi.org\/10.1109\/nems.2010.5592439","relation":{},"subject":[],"published":{"date-parts":[[2010,1]]}}}