{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:49:37Z","timestamp":1730285377665,"version":"3.28.0"},"reference-count":4,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010,1]]},"DOI":"10.1109\/nems.2010.5592490","type":"proceedings-article","created":{"date-parts":[[2010,10,1]],"date-time":"2010-10-01T16:09:54Z","timestamp":1285949394000},"page":"654-657","source":"Crossref","is-referenced-by-count":1,"title":["Fabrication of ultra-deep high-aspect-ratio isolation trench without void and its application"],"prefix":"10.1109","author":[{"family":"Liang Qian","sequence":"first","affiliation":[]},{"family":"Jia Wang","sequence":"additional","affiliation":[]},{"family":"Zhenchuan Yang","sequence":"additional","affiliation":[]},{"family":"Guizhen Yan","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","article-title":"Fabrication of ultra-deep electrical isolation trenches with high aspect ratio using DRIE and Dielectric Refill","volume":"26","author":"zhu","year":"2005","journal-title":"Chinese Jounal of semiconductors"},{"doi-asserted-by":"publisher","key":"ref3","DOI":"10.1088\/0960-1317\/15\/3\/027"},{"key":"ref2","first-page":"482","article-title":"Performance comparison of integrated Z-axis frame microgyroscopes","author":"palaniapan","year":"2003","journal-title":"Proc MEMS"},{"doi-asserted-by":"publisher","key":"ref1","DOI":"10.1109\/JSSC.2002.804345"}],"event":{"name":"2010 5th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS 2010)","start":{"date-parts":[[2010,1,20]]},"location":"Xiamen","end":{"date-parts":[[2010,1,23]]}},"container-title":["2010 IEEE 5th International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5583931\/5592106\/05592490.pdf?arnumber=5592490","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,21]],"date-time":"2017-03-21T03:51:52Z","timestamp":1490068312000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5592490\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,1]]},"references-count":4,"URL":"https:\/\/doi.org\/10.1109\/nems.2010.5592490","relation":{},"subject":[],"published":{"date-parts":[[2010,1]]}}}