{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,7]],"date-time":"2024-09-07T08:42:56Z","timestamp":1725698576090},"reference-count":6,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010,1]]},"DOI":"10.1109\/nems.2010.5592504","type":"proceedings-article","created":{"date-parts":[[2010,10,1]],"date-time":"2010-10-01T16:09:54Z","timestamp":1285949394000},"page":"696-699","source":"Crossref","is-referenced-by-count":1,"title":["Fabrication and performance analysis of an amorphous silicon-based thermal IR detector"],"prefix":"10.1109","author":[{"family":"Hyun Oh Kang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Zhao Zhiguo","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Seong Ki Jeon","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Ho Jung","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Hak-Rin Kim","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Dae-Hyuk Kwon","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Jung-Hee Lee","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Shin-Won Kang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Seong Ho Kong","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","first-page":"3","article-title":"Breakthrough in infrared technology - the micromachined thermal detecto arrays","author":"piotrowski","year":"1995","journal-title":"Opto-Electronics Review"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/84.661385"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/S1350-4495(03)00178-6"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1007\/s11664-005-0055-z"},{"key":"ref2","doi-asserted-by":"crossref","first-page":"452","DOI":"10.1016\/j.sna.2006.03.006","article-title":"Micromachined bolometers on polyimide","author":"mahmood","year":"2006","journal-title":"Sensors and Actuators A"},{"key":"ref1","first-page":"610","article-title":"An uncooled microblometer infrared detector in any standard cmos technology","author":"tezcan","year":"1999","journal-title":"10th Int Conf Solid-State Sensors and Actuators (Transducers 99)"}],"event":{"name":"2010 5th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS 2010)","start":{"date-parts":[[2010,1,20]]},"location":"Xiamen","end":{"date-parts":[[2010,1,23]]}},"container-title":["2010 IEEE 5th International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5583931\/5592106\/05592504.pdf?arnumber=5592504","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,19]],"date-time":"2017-06-19T10:42:23Z","timestamp":1497868943000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5592504\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,1]]},"references-count":6,"URL":"https:\/\/doi.org\/10.1109\/nems.2010.5592504","relation":{},"subject":[],"published":{"date-parts":[[2010,1]]}}}