{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T09:11:10Z","timestamp":1729674670440,"version":"3.28.0"},"reference-count":6,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010,1]]},"DOI":"10.1109\/nems.2010.5592579","type":"proceedings-article","created":{"date-parts":[[2010,10,1]],"date-time":"2010-10-01T20:09:54Z","timestamp":1285963794000},"page":"1040-1043","source":"Crossref","is-referenced-by-count":0,"title":["A single mask dry releasing process for making high aspect ratio soimemsdevices"],"prefix":"10.1109","author":[{"given":"Y M","family":"Wei","sequence":"first","affiliation":[]},{"given":"X","family":"Mao","sequence":"additional","affiliation":[]},{"given":"Z C","family":"Yang","sequence":"additional","affiliation":[]},{"given":"G Z","family":"Yan","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/14\/7\/014"},{"key":"ref3","doi-asserted-by":"crossref","first-page":"541","DOI":"10.1109\/JMEMS.2006.876660","article-title":"Layout Controlled one-step dry etch and release of MEMS using deep RIE on SOI wafer","volume":"15","author":"liu","year":"2006","journal-title":"J Microelectromech Syst"},{"key":"ref6","first-page":"506","article-title":"The method of prevent footing effect in making SOI micro-mechanical structure","author":"mao","year":"2009","journal-title":"Proceedings of the 4th IEEE"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/15\/11\/017"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/MEMS.2004.1290685"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1117\/1.2114787"}],"event":{"name":"2010 5th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS 2010)","start":{"date-parts":[[2010,1,20]]},"location":"Xiamen","end":{"date-parts":[[2010,1,23]]}},"container-title":["2010 IEEE 5th International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5583931\/5592106\/05592579.pdf?arnumber=5592579","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,19]],"date-time":"2017-06-19T14:42:10Z","timestamp":1497883330000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5592579\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,1]]},"references-count":6,"URL":"https:\/\/doi.org\/10.1109\/nems.2010.5592579","relation":{},"subject":[],"published":{"date-parts":[[2010,1]]}}}