{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,4,22]],"date-time":"2025-04-22T15:28:40Z","timestamp":1745335720271},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010,1]]},"DOI":"10.1109\/nems.2010.5592597","type":"proceedings-article","created":{"date-parts":[[2010,10,1]],"date-time":"2010-10-01T20:09:54Z","timestamp":1285963794000},"page":"997-1001","source":"Crossref","is-referenced-by-count":2,"title":["Simple sticking models and adhesion criterion to predict sticking effects of fixed-fixed beams in RF MEMS switch design"],"prefix":"10.1109","author":[{"family":"Yu Hui","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Kai Yang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Binbin Jiao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Yupeng Jing","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Dapeng Chen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","first-page":"30","article-title":"The effects of capillary force in micro or nano-indentation","author":"chen","year":"2008","journal-title":"2nd International Conference on Heterogeneous Material Mechanics"},{"key":"ref3","first-page":"231","article-title":"RF MEMS capacitive switches fabricated with HDICP CVD SiNx","author":"chang","year":"2002","journal-title":"IEEE MTT-S Int Microwave Symp Dig"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/IMPACT.2006.312201"},{"article-title":"RF MEMS Theory Design and Technology","year":"2003","author":"rebeiz","key":"ref6"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/16\/4\/025"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/6144.974955"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/6668.969936"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/84.232593"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(97)80033-7"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2008.01.093"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(02)00150-4"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/75.704410"}],"event":{"name":"2010 5th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS 2010)","start":{"date-parts":[[2010,1,20]]},"location":"Xiamen","end":{"date-parts":[[2010,1,23]]}},"container-title":["2010 IEEE 5th International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5583931\/5592106\/05592597.pdf?arnumber=5592597","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,21]],"date-time":"2017-03-21T08:02:32Z","timestamp":1490083352000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5592597\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,1]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/nems.2010.5592597","relation":{},"subject":[],"published":{"date-parts":[[2010,1]]}}}