{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T18:47:47Z","timestamp":1729622867394,"version":"3.28.0"},"reference-count":14,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2011,2]]},"DOI":"10.1109\/nems.2011.6017369","type":"proceedings-article","created":{"date-parts":[[2011,9,21]],"date-time":"2011-09-21T20:16:23Z","timestamp":1316636183000},"page":"367-371","source":"Crossref","is-referenced-by-count":7,"title":["Electrodeposition and characterization of CoNiMnP-based permanent magnetic film for MEMS applications"],"prefix":"10.1109","author":[{"given":"Xu-Ming","family":"Sun","sequence":"first","affiliation":[]},{"given":"Quan","family":"Yuan","sequence":"additional","affiliation":[]},{"given":"Dong-Ming","family":"Fang","sequence":"additional","affiliation":[]},{"given":"Hai-Xia","family":"Zhang","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"13","doi-asserted-by":"publisher","DOI":"10.1149\/1.1837209"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1016\/S0013-4686(02)00160-3"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.1969.1066643"},{"key":"12","doi-asserted-by":"crossref","first-page":"49","DOI":"10.1016\/j.jmmm.2004.10.094","article-title":"Electrodeposition of low residual stress CoNiMnP hard magnetic thin films for magnetic MEMS actuators","volume":"292","author":"guan","year":"2005","journal-title":"Journal of Magnetism and Magnetic Materials"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/16\/2\/005"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2010.5592126"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1016\/j.electacta.2006.07.062"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1063\/1.372699"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2005.863707"},{"key":"6","first-page":"60","article-title":"High strength rare earth-iron-boron printed magnets used in a long throw-high force electromagnetic actuator with microfabricated coils","author":"vollmers","year":"2003","journal-title":"Proc IEEE 16th Int Conf on MEMS (MEMS2003)"},{"key":"5","doi-asserted-by":"crossref","first-page":"75","DOI":"10.1016\/S0304-8853(99)00649-6","article-title":"Permanent magnet films for applications in microelectromechanical systems","volume":"209","author":"chin","year":"2000","journal-title":"Journal of Magnetism and Magnetic Materials"},{"key":"4","article-title":"Electromagnetic energy harveser fabricated with electrodeposition process","author":"quan","year":"0","journal-title":"Power MEMS 2010"},{"key":"9","first-page":"79","article-title":"Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications","author":"trifon","year":"0","journal-title":"Micro Electro Mechanical Systems 1996 MEMS '96"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1016\/S0304-8853(03)00264-6"}],"event":{"name":"2011 IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2011,2,20]]},"location":"Kaohsiung, Taiwan","end":{"date-parts":[[2011,2,23]]}},"container-title":["2011 6th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6008678\/6017279\/06017369.pdf?arnumber=6017369","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T06:43:59Z","timestamp":1497941039000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6017369\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,2]]},"references-count":14,"URL":"https:\/\/doi.org\/10.1109\/nems.2011.6017369","relation":{},"subject":[],"published":{"date-parts":[[2011,2]]}}}