{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T20:22:56Z","timestamp":1729628576689,"version":"3.28.0"},"reference-count":10,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2011,2]]},"DOI":"10.1109\/nems.2011.6017437","type":"proceedings-article","created":{"date-parts":[[2011,9,21]],"date-time":"2011-09-21T20:16:23Z","timestamp":1316636183000},"page":"642-645","source":"Crossref","is-referenced-by-count":2,"title":["Design of a novel low cross-axis sensitivity micro-gravity sandwich capacitance accelerometer"],"prefix":"10.1109","author":[{"given":"Qifang","family":"Hu","sequence":"first","affiliation":[]},{"given":"Chengchen","family":"Gao","sequence":"additional","affiliation":[]},{"given":"Yangxi","family":"Zhang","sequence":"additional","affiliation":[]},{"given":"Jian","family":"Cui","sequence":"additional","affiliation":[]},{"given":"Yilong","family":"Hao","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/15\/11\/017"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2007.900879"},{"key":"10","doi-asserted-by":"crossref","DOI":"10.1088\/0960-1317\/18\/7\/075005","article-title":"A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon","volume":"18","author":"xiao","year":"2008","journal-title":"Journal of Micromechanics and Microengineering"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/84.809058"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/2\/2\/006"},{"key":"6","doi-asserted-by":"crossref","first-page":"378","DOI":"10.1016\/j.sna.2004.05.008","article-title":"A z-axis differential capacitive SOI accelerometer with vertical comb electrodes","volume":"116","author":"tsuchiya","year":"2004","journal-title":"Sensors and Actuators A-Physical"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(98)00036-3"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/11\/1\/308"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2004.832653"},{"key":"8","first-page":"511","article-title":"Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer","volume":"15","author":"sankar","year":"2009","journal-title":"Microsystem Technol Micro Nanosyst Inf Storage Process Syst"}],"event":{"name":"2011 IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2011,2,20]]},"location":"Kaohsiung, Taiwan","end":{"date-parts":[[2011,2,23]]}},"container-title":["2011 6th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6008678\/6017279\/06017437.pdf?arnumber=6017437","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T06:43:59Z","timestamp":1497941039000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6017437\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,2]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/nems.2011.6017437","relation":{},"subject":[],"published":{"date-parts":[[2011,2]]}}}