{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,23]],"date-time":"2025-10-23T11:05:02Z","timestamp":1761217502838,"version":"3.28.0"},"reference-count":11,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2011,2]]},"DOI":"10.1109\/nems.2011.6017451","type":"proceedings-article","created":{"date-parts":[[2011,9,21]],"date-time":"2011-09-21T20:16:23Z","timestamp":1316636183000},"page":"703-706","source":"Crossref","is-referenced-by-count":1,"title":["Fabrication of sub-micrometer surface structures on sapphire substrate for GaN-based light-emitting diodes by metal contact printing method"],"prefix":"10.1109","author":[{"given":"Yi-Ta","family":"Hsieh","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wei-Ru","family":"Chen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"An-Ru","family":"Lin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yung-Chun","family":"Lee","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hung-Yi","family":"Lin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/JDT.2007.894380"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1063\/1.3327004"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1016\/j.optmat.2004.08.076"},{"key":"1","doi-asserted-by":"crossref","first-page":"4167","DOI":"10.1016\/j.jcrysgro.2009.07.023","article-title":"Reducing dislocation density in GaN films using a cone-shaped patterned sapphire substrate","volume":"311","author":"shin","year":"2009","journal-title":"J Cryst Growth"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1364\/AO.40.003698"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1016\/j.cap.2008.05.020"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1016\/j.jcrysgro.2009.01.055"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1149\/1.3231502"},{"key":"9","doi-asserted-by":"crossref","first-page":"60","DOI":"10.1016\/S0921-5107(02)00019-3","article-title":"Dry etching of sapphire substrate for device separation in chlorine-based inductively coupled plasmas","volume":"93","author":"jeong","year":"2002","journal-title":"Materials Science and Engineering B Solid-State Materials for Advanced Technology"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/18\/7\/075013"},{"key":"11","doi-asserted-by":"crossref","first-page":"441","DOI":"10.1016\/S0167-9317(02)00464-1","volume":"61 62","author":"beck","year":"2002","journal-title":"Microelectron Eng"}],"event":{"name":"2011 IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2011,2,20]]},"location":"Kaohsiung, Taiwan","end":{"date-parts":[[2011,2,23]]}},"container-title":["2011 6th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6008678\/6017279\/06017451.pdf?arnumber=6017451","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T06:44:03Z","timestamp":1497941043000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6017451\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,2]]},"references-count":11,"URL":"https:\/\/doi.org\/10.1109\/nems.2011.6017451","relation":{},"subject":[],"published":{"date-parts":[[2011,2]]}}}