{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T05:29:00Z","timestamp":1729661340382,"version":"3.28.0"},"reference-count":6,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2011,2]]},"DOI":"10.1109\/nems.2011.6017472","type":"proceedings-article","created":{"date-parts":[[2011,9,21]],"date-time":"2011-09-21T16:16:23Z","timestamp":1316621783000},"page":"788-791","source":"Crossref","is-referenced-by-count":1,"title":["A new integrated temperature and humidity"],"prefix":"10.1109","author":[{"given":"Zhen","family":"Fang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhan","family":"Zhao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiangang","family":"Zhang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lidong","family":"Du","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jing","family":"Xu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Daoqu","family":"Geng","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yaohong","family":"Shi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","first-page":"1350","article-title":"Micro integrated pressure, temperature, and relative humidity sensor using adhesive bonding with SU-8","volume":"17","author":"zhang","year":"2009","journal-title":"Optics and Precision Engineering"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2006.334896"},{"key":"1","doi-asserted-by":"crossref","first-page":"196","DOI":"10.1016\/S0924-4247(01)00788-9","article-title":"Recent achievements in miniaturised humidity sensors - A review of transduction techniques","volume":"96","author":"rittersma","year":"2002","journal-title":"Sensors and Actuators A Physical"},{"key":"6","first-page":"70","author":"makita","year":"1975","journal-title":"Viscosity and Thermal Conductivity"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1016\/0925-4005(95)85189-5"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1016\/0925-4005(96)80090-6"}],"event":{"name":"2011 IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2011,2,20]]},"location":"Kaohsiung, Taiwan","end":{"date-parts":[[2011,2,23]]}},"container-title":["2011 6th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6008678\/6017279\/06017472.pdf?arnumber=6017472","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T02:44:02Z","timestamp":1497926642000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6017472\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,2]]},"references-count":6,"URL":"https:\/\/doi.org\/10.1109\/nems.2011.6017472","relation":{},"subject":[],"published":{"date-parts":[[2011,2]]}}}