{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T01:06:21Z","timestamp":1729645581282,"version":"3.28.0"},"reference-count":49,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2011,2]]},"DOI":"10.1109\/nems.2011.6017490","type":"proceedings-article","created":{"date-parts":[[2011,9,21]],"date-time":"2011-09-21T20:16:23Z","timestamp":1316636183000},"page":"863-867","source":"Crossref","is-referenced-by-count":0,"title":["Confined etchant layer technique (CELT) for micromanufacture"],"prefix":"10.1109","author":[{"given":"Dongping","family":"Zhan","sequence":"first","affiliation":[]},{"given":"Lianhuan","family":"Han","sequence":"additional","affiliation":[]},{"given":"Dezhi","family":"Yang","sequence":"additional","affiliation":[]},{"given":"Li-min","family":"Jiang","sequence":"additional","affiliation":[]},{"given":"Jing","family":"Tang","sequence":"additional","affiliation":[]},{"given":"Jian-jun","family":"Sun","sequence":"additional","affiliation":[]},{"given":"Kang","family":"Shi","sequence":"additional","affiliation":[]},{"given":"Jianzhang","family":"Zhou","sequence":"additional","affiliation":[]},{"given":"Zhong-Qun","family":"Tian","sequence":"additional","affiliation":[]},{"given":"Zhao-Wu","family":"Tian","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"journal-title":"Fabrication Method of Glass Microfluidic Chips","year":"2009","author":"ye","key":"35"},{"key":"36","first-page":"227","article-title":"Chemical microetching of three-dimensional gear-like patterns on copper surface","volume":"21","author":"liu","year":"2004","journal-title":"Chin J Appl Chem"},{"key":"33","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2007.351975"},{"key":"34","doi-asserted-by":"publisher","DOI":"10.1149\/1.3504127"},{"key":"39","first-page":"1540","article-title":"Investigation of microstructure-machining on aluminium surface by confined etchant layer technique","volume":"8","author":"jiang","year":"2006","journal-title":"Chem Res Chin Univ"},{"key":"37","doi-asserted-by":"publisher","DOI":"10.1016\/j.jelechem.2004.11.041"},{"key":"38","first-page":"249","article-title":"Chemical microetching of three-dimensional gearlike pattern on nickel surface","volume":"4","author":"liu","year":"2004","journal-title":"Electrochemistry"},{"key":"43","doi-asserted-by":"crossref","first-page":"1307","DOI":"10.3866\/PKU.WHXB20080732","article-title":"Electrochemical micromachining microstructure lattice on magnesium alloy surface","volume":"24","author":"jiang","year":"2008","journal-title":"Acta Phys -Chim Sin"},{"key":"42","doi-asserted-by":"publisher","DOI":"10.1007\/s10800-008-9513-7"},{"key":"41","doi-asserted-by":"publisher","DOI":"10.1016\/j.electacta.2006.11.046"},{"key":"40","doi-asserted-by":"crossref","first-page":"619","DOI":"10.4028\/www.scientific.net\/KEM.288-289.619","article-title":"Novel techniques of titanium surface patterning","volume":"288 289","author":"jiang","year":"2005","journal-title":"Key Engineering Materials"},{"key":"22","first-page":"253","article-title":"Three-dimensional micro-fabrication on ga as using a regular patterns mold","volume":"6","author":"huan","year":"2000","journal-title":"Electrochemistry"},{"key":"23","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200700300"},{"key":"24","doi-asserted-by":"publisher","DOI":"10.1016\/j.electacta.2006.05.059"},{"key":"25","doi-asserted-by":"publisher","DOI":"10.1016\/S0013-4686(01)00596-5"},{"journal-title":"Fabrication Method for Micro-and Nano-meter GaAs Optical Microdevice","year":"2008","author":"tang","key":"26"},{"key":"27","doi-asserted-by":"crossref","first-page":"507","DOI":"10.3866\/PKU.WHXB20060423","article-title":"Concentration protile of etchant measured by microelectrode technique in the process of chemical micromachining","volume":"22","author":"tang","year":"2006","journal-title":"Acta Physico - Chimica Sinica"},{"key":"28","first-page":"270","article-title":"The determination of the reaction rate constant of as(III) scavenging etchant","volume":"1","author":"luo","year":"1995","journal-title":"Electrochemistry"},{"key":"29","first-page":"330","article-title":"The development of microsystems and new applications of electrochemistry","volume":"40","author":"tian","year":"2001","journal-title":"Journal of Xiamen University (Natural Science)"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1201\/9780203910771"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1126\/science.275.5303.1097"},{"key":"1","doi-asserted-by":"crossref","first-page":"255","DOI":"10.1016\/S0167-9317(03)00467-2","volume":"70","author":"fayollea","year":"2003","journal-title":"Microelec Eng"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1016\/S0013-4686(97)00146-1"},{"key":"30","first-page":"1","article-title":"The development of microsystems and new applications of electrochemistry","volume":"7","author":"tian","year":"2001","journal-title":"Electrochemistry"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1088\/0022-3727\/40\/22\/R02"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1016\/j.jmatprotec.2004.02.003"},{"key":"32","first-page":"14","article-title":"Micro-(Nano-)Fabrication techniques for three dimensional complex patterns-their common difficulties and solutions","volume":"17","author":"tian","year":"1996","journal-title":"Chin J Sci Instrum"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1126\/science.289.5476.98"},{"key":"31","doi-asserted-by":"crossref","first-page":"965","DOI":"10.3866\/PKU.WHXB19971102","article-title":"On the etching revolution of electrochemical micro-(Nano)Fabrication technique-its limit and solution","volume":"13","author":"zu","year":"1997","journal-title":"Acta Phys -Chim Sin"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1016\/j.mejo.2003.10.003"},{"key":"8","doi-asserted-by":"crossref","first-page":"413","DOI":"10.2494\/photopolymer.16.413","volume":"16","author":"singleton","year":"2003","journal-title":"J Photopolym Sci Tech"},{"journal-title":"Fabrication Method and Instrument for Complex 3D Microstructure on Silicon Surface","year":"2005","author":"kang shi","key":"19"},{"journal-title":"Scaaning Instrument for the Measurements Ofpotential and Current Distributionin Local Micro-area Corrosion","year":"0","author":"tian","key":"17"},{"journal-title":"Fabrication Method and Instruments for Complex 3D Microstructure on Metal Surface","year":"2003","author":"tian","key":"18"},{"journal-title":"Electrochemical Methods Fundamentals and Applications","year":"2001","author":"bard","key":"15"},{"key":"16","first-page":"193","article-title":"Study on the confined etchant layer techiaue dor 3-dimensional microfabrication","volume":"17","author":"xie","year":"1996","journal-title":"Chinese Journal of Scientific Instrument"},{"key":"13","article-title":"EFAB: Batch production of functional, fully-dense metal parts with micron- scale features","author":"cohen","year":"0","journal-title":"Solid Freeform Fabrication Symposium 1998"},{"key":"14","doi-asserted-by":"crossref","first-page":"37","DOI":"10.1039\/fd9929400037","article-title":"Confined etchant layer technique for two dimensional lithography at high resolution using electrochemical scanning tunnelling icroscopy","volume":"94","author":"tian","year":"1992","journal-title":"Faraday Discuss"},{"key":"11","article-title":"EFAB: Low-cost, automated electrochemical batch fabrication of arbitrary 3-D microstructures. Micromachining and microfabrication process technology","author":"cohen","year":"1999","journal-title":"SPIE 1999 Symposium on Micromachining and Microfabrication"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.1999.746824"},{"key":"21","doi-asserted-by":"crossref","first-page":"1671","DOI":"10.3866\/PKU.WHXB20090810","article-title":"Electrochemical micromachining on different types of GaAs by confined etchant layer technique","volume":"25","author":"tang","year":"2009","journal-title":"Acta Phys -chem Sinica"},{"journal-title":"Electrochemical Planarizatino and Polishing Method and Instrument with Nanometer Procision","year":"2010","author":"tian","key":"20"},{"journal-title":"Free Radical Etching for CELT Micromanufacture","year":"0","author":"zhan","key":"49"},{"journal-title":"Selective Electrodepo-sition of Copper Microstructure on N-si Surface","year":"2008","author":"tang","key":"48"},{"key":"45","doi-asserted-by":"publisher","DOI":"10.1016\/S0013-4686(97)00301-0"},{"key":"44","doi-asserted-by":"publisher","DOI":"10.1007\/BF02882770"},{"journal-title":"Electrochemical Machining Method for Complex Microstructure on P-si Surface","year":"2008","author":"tang","key":"47"},{"key":"46","doi-asserted-by":"publisher","DOI":"10.1007\/s10008-004-0636-4"},{"key":"10","first-page":"1","article-title":"Microsystem and elect rochemistry","volume":"6","author":"tian","year":"2000","journal-title":"Electrochem (in Chinese)"}],"event":{"name":"2011 IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2011,2,20]]},"location":"Kaohsiung, Taiwan","end":{"date-parts":[[2011,2,23]]}},"container-title":["2011 6th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6008678\/6017279\/06017490.pdf?arnumber=6017490","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,12,6]],"date-time":"2021-12-06T01:07:02Z","timestamp":1638752822000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6017490\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,2]]},"references-count":49,"URL":"https:\/\/doi.org\/10.1109\/nems.2011.6017490","relation":{},"subject":[],"published":{"date-parts":[[2011,2]]}}}