{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T23:16:54Z","timestamp":1729639014522,"version":"3.28.0"},"reference-count":17,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2011,2]]},"DOI":"10.1109\/nems.2011.6017492","type":"proceedings-article","created":{"date-parts":[[2011,9,21]],"date-time":"2011-09-21T20:16:23Z","timestamp":1316636183000},"page":"873-876","source":"Crossref","is-referenced-by-count":3,"title":["A novel bulk micromachined tunneling gyroscope"],"prefix":"10.1109","author":[{"given":"Lingyun","family":"Wang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yuanzhe","family":"Su","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yi","family":"Lei","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wenwang","family":"Li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yifang","family":"Liu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Daoheng","family":"Sun","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"17","doi-asserted-by":"crossref","first-page":"24","DOI":"10.1016\/S0924-4247(99)00375-1","article-title":"A bulk micromachined vibratory lateral gyroscope fabricated with wafer bonding and deep trench etching","volume":"83","author":"li","year":"2000","journal-title":"Sensor and Actuators"},{"key":"15","first-page":"148","article-title":"Design and noise analysis of a micromachined gyroscope working at atmospheric pressure","volume":"26","author":"chen","year":"2005","journal-title":"Pan Tao Ti Hsueh Pao\/Chinese Journal of Semiconductors"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1016\/S0169-4332(01)00197-0"},{"key":"13","doi-asserted-by":"crossref","first-page":"137","DOI":"10.1016\/S0924-4247(03)00296-6","article-title":"A novel bulk micromachined gyroscope with slots structure working at atmosphere","volume":"107","author":"bin","year":"2003","journal-title":"Sensors and Actuators A"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.1995.721906"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/84.809059"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(03)00296-6"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.1993.296932"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(98)00048-X"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1080\/002072199132734"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2004.12.021"},{"journal-title":"A high aspect-ratio high-performance polysilicon vibrating ring gyroscope","year":"2001","author":"ayazi","key":"7"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/84.925732"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(96)80093-8"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2003.817901"},{"key":"9","doi-asserted-by":"crossref","first-page":"1099","DOI":"10.1109\/4.777108","article-title":"An integrated controller for tunnel sensors","volume":"34","author":"aaron","year":"1999","journal-title":"IEEE Journal of Solid-State Circuit"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1116\/1.588637"}],"event":{"name":"2011 IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2011,2,20]]},"location":"Kaohsiung, Taiwan","end":{"date-parts":[[2011,2,23]]}},"container-title":["2011 6th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6008678\/6017279\/06017492.pdf?arnumber=6017492","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T06:43:52Z","timestamp":1497941032000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6017492\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,2]]},"references-count":17,"URL":"https:\/\/doi.org\/10.1109\/nems.2011.6017492","relation":{},"subject":[],"published":{"date-parts":[[2011,2]]}}}