{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:50:06Z","timestamp":1730285406352,"version":"3.28.0"},"reference-count":5,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2011,2]]},"DOI":"10.1109\/nems.2011.6017508","type":"proceedings-article","created":{"date-parts":[[2011,9,21]],"date-time":"2011-09-21T16:16:23Z","timestamp":1316621783000},"page":"936-939","source":"Crossref","is-referenced-by-count":0,"title":["Analysis and design of magnetic mesa-structure array for ensemble detection applications of nuclear spins"],"prefix":"10.1109","author":[{"given":"Xiaoqiang","family":"Li","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dong F.","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ryutaro","family":"Maeda","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","first-page":"1268","article-title":"Long term stability of dry etched magnetoresistive random access memory elements","volume":"18","author":"cho","year":"2000","journal-title":"J Vac Sci Technol A"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/16\/6\/062"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.89.017901"},{"key":"5","first-page":"1552","article-title":"A pattern edge profile simulation for oblique ion milling","volume":"a2","author":"noriyoshi","year":"1984","journal-title":"J Vac Sci Technol"},{"key":"4","first-page":"2223","article-title":"Effect of inert gas additive on cl2-based inductively coupled plasma etching of NiFe and NiFeCo","volume":"71","author":"jung","year":"1997","journal-title":"Appl Phys Lett"}],"event":{"name":"2011 IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2011,2,20]]},"location":"Kaohsiung, Taiwan","end":{"date-parts":[[2011,2,23]]}},"container-title":["2011 6th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6008678\/6017279\/06017508.pdf?arnumber=6017508","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,21]],"date-time":"2017-03-21T08:20:50Z","timestamp":1490084450000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6017508\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,2]]},"references-count":5,"URL":"https:\/\/doi.org\/10.1109\/nems.2011.6017508","relation":{},"subject":[],"published":{"date-parts":[[2011,2]]}}}