{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T20:37:01Z","timestamp":1729629421143,"version":"3.28.0"},"reference-count":20,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,3]]},"DOI":"10.1109\/nems.2012.6196718","type":"proceedings-article","created":{"date-parts":[[2012,5,24]],"date-time":"2012-05-24T18:26:58Z","timestamp":1337884018000},"page":"40-44","source":"Crossref","is-referenced-by-count":1,"title":["Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes"],"prefix":"10.1109","author":[{"given":"Yi-Ta","family":"Hsieh","sequence":"first","affiliation":[]},{"given":"Yung-Chun","family":"Lee","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"crossref","first-page":"1103","DOI":"10.1088\/0957-4484\/15\/8\/040","volume":"15","author":"suh","year":"2004","journal-title":"Nanotechnology"},{"key":"17","doi-asserted-by":"crossref","first-page":"633","DOI":"10.1016\/j.cap.2008.05.020","volume":"9","author":"lee","year":"2009","journal-title":"Curro Appl Phys"},{"key":"18","doi-asserted-by":"crossref","first-page":"220","DOI":"10.1109\/84.475549","volume":"4","author":"miyajima","year":"1995","journal-title":"J Microelectromech Syst"},{"key":"15","doi-asserted-by":"crossref","first-page":"76","DOI":"10.1016\/j.mseb.2009.07.006","volume":"164","author":"huang","year":"2009","journal-title":"Mat Sci Eng"},{"key":"16","doi-asserted-by":"crossref","first-page":"2973","DOI":"10.1016\/j.jcrysgro.2009.01.055","volume":"311","author":"su","year":"2009","journal-title":"J Cryst Growth"},{"key":"13","doi-asserted-by":"crossref","first-page":"50","DOI":"10.1016\/S0921-5107(00)00716-9","volume":"82","author":"sung","year":"2001","journal-title":"Mat Sci Eng"},{"key":"14","doi-asserted-by":"crossref","first-page":"15001","DOI":"10.1088\/0960-1317\/21\/1\/015001","volume":"21","author":"hsieh","year":"2011","journal-title":"J Micromeh Mocroeng"},{"key":"11","doi-asserted-by":"crossref","first-page":"765","DOI":"10.1149\/1.2209587","volume":"153","author":"wuu","year":"2006","journal-title":"J Electrochem Soc"},{"key":"12","doi-asserted-by":"crossref","first-page":"2232","DOI":"10.1007\/s11431-011-4396-y","volume":"54","author":"yang","year":"2011","journal-title":"Sci China Tech Sci"},{"key":"3","doi-asserted-by":"crossref","first-page":"450","DOI":"10.1109\/68.992574","volume":"14","author":"sheu","year":"2002","journal-title":"IEEE Photon Technol Lett"},{"key":"20","doi-asserted-by":"crossref","first-page":"5730","DOI":"10.1063\/1.1829774","volume":"58","author":"hur","year":"2004","journal-title":"Appl Phys Lett"},{"key":"2","doi-asserted-by":"crossref","first-page":"944","DOI":"10.1109\/LPT.2011.2142397","volume":"23","author":"huang","year":"2011","journal-title":"IEEE Photon Technol Lett"},{"key":"1","doi-asserted-by":"crossref","first-page":"714","DOI":"10.1016\/j.jpcs.2007.07.075","volume":"69","author":"wang","year":"2008","journal-title":"J Phys Chem Solids"},{"key":"10","doi-asserted-by":"crossref","first-page":"874","DOI":"10.1149\/1.3231502","volume":"156","author":"lin","year":"2009","journal-title":"J Electrochem Soc"},{"key":"7","doi-asserted-by":"crossref","first-page":"509","DOI":"10.1016\/j.sse.2009.11.005","volume":"54","author":"kissinger","year":"2010","journal-title":"Solid-State Electron"},{"key":"6","doi-asserted-by":"crossref","first-page":"338","DOI":"10.1016\/S0022-0248(00)00710-7","volume":"221","author":"ishibashi","year":"2000","journal-title":"J Cryst Growth"},{"key":"5","doi-asserted-by":"crossref","first-page":"965","DOI":"10.1109\/LPT.2011.2148195","volume":"23","author":"wang","year":"2011","journal-title":"IEEE Photon Technol Lett"},{"key":"4","doi-asserted-by":"crossref","first-page":"949","DOI":"10.1364\/OE.19.00A949","volume":"19","author":"huang","year":"2011","journal-title":"Optic Express"},{"key":"9","doi-asserted-by":"crossref","first-page":"118","DOI":"10.1109\/JDT.2007.894380","volume":"3","author":"lee","year":"2007","journal-title":"J Display Technol"},{"key":"8","doi-asserted-by":"crossref","first-page":"4167","DOI":"10.1016\/j.jcrysgro.2009.07.023","volume":"311","author":"shin","year":"2009","journal-title":"J Cryst Growth"}],"event":{"name":"2012 7th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2012,3,5]]},"location":"Kyoto, Japan","end":{"date-parts":[[2012,3,8]]}},"container-title":["2012 7th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6189421\/6196692\/06196718.pdf?arnumber=6196718","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T15:14:23Z","timestamp":1497971663000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6196718\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,3]]},"references-count":20,"URL":"https:\/\/doi.org\/10.1109\/nems.2012.6196718","relation":{},"subject":[],"published":{"date-parts":[[2012,3]]}}}