{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:50:27Z","timestamp":1730285427730,"version":"3.28.0"},"reference-count":6,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,3]]},"DOI":"10.1109\/nems.2012.6196776","type":"proceedings-article","created":{"date-parts":[[2012,5,24]],"date-time":"2012-05-24T22:26:58Z","timestamp":1337898418000},"page":"286-289","source":"Crossref","is-referenced-by-count":1,"title":["Dry mechanical liftoff technology for metallization on parylene-C using SU-8"],"prefix":"10.1109","author":[{"given":"Jay Han-Chieh","family":"Chang","sequence":"first","affiliation":[]},{"given":"Dongyang","family":"Kang","sequence":"additional","affiliation":[]},{"given":"Yu-Chong","family":"Tai","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"year":"0","key":"3"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2011.5969478"},{"key":"1","first-page":"30","article-title":"Literature Review: Biological safety of parylene C","volume":"3","author":"nancy","year":"1996","journal-title":"Medical Plastics Biomater"},{"year":"0","key":"6"},{"year":"0","key":"5"},{"key":"4","first-page":"390","article-title":"Adhesion-Enhancement Surface Treatment for Parylene Deposition","author":"chang","year":"0","journal-title":"Froc Transducers 2011"}],"event":{"name":"2012 7th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2012,3,5]]},"location":"Kyoto, Japan","end":{"date-parts":[[2012,3,8]]}},"container-title":["2012 7th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6189421\/6196692\/06196776.pdf?arnumber=6196776","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,21]],"date-time":"2017-03-21T15:47:56Z","timestamp":1490111276000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6196776\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,3]]},"references-count":6,"URL":"https:\/\/doi.org\/10.1109\/nems.2012.6196776","relation":{},"subject":[],"published":{"date-parts":[[2012,3]]}}}